Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 3  0 1 2

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0681705
0 0.31 0 0.0681705
0 0.48 0 0.0681705
0 0.705 0 0.0681705
0 0.79 0 0.0681705
0 0.96 0 0.0681705
0 1.185 0 0.0681705
0 1.27 0 0.0681705
0 1.44 0 0.0681705
0 1.92 0 0.0681705
0.31 0.31 0 0.0681705
0.31 0.48 0 0.0681705
0.31 0.705 0 0.0681705
0.31 0.79 0 0.0681705
0.31 0.96 0 0.0681705
0.31 1.185 0 0.0681705
0.31 1.27 0 0.0681705
0.31 1.44 0 0.0681705
0.31 1.92 0 0.0681705
0.48 0.48 0 0.0681705
0.48 0.705 0 0.0681705
0.48 0.79 0 0.0681705
0.48 0.96 0 0.0681705
0.48 1.185 0 0.0681705
0.48 1.27 0 0.0681705
0.48 1.44 0 0.0681705
0.48 1.92 0 0.0681705
0.705 0.705 0 0.0681705
0.705 0.79 0 0.0681705
0.705 0.96 0 0.0681705
0.705 1.185 0 0.0681705
0.705 1.27 0 0.0681705
0.705 1.44 0 0.0681705
0.705 1.92 0 0.0681705
0.79 0.79 0 0.0681705
0.79 0.96 0 0.0681705
0.79 1.185 0 0.0681705
0.79 1.27 0 0.0681705
0.79 1.44 0 0.0681705
0.79 1.92 0 0.0681705
0.96 0.96 0 0.0681705
0.96 1.185 0 0.0681705
0.96 1.27 0 0.0681705
0.96 1.44 0 0.0681705
0.96 1.92 0 0.0681705
1.185 1.185 0 0.0681705
1.185 1.27 0 0.0681705
1.185 1.44 0 0.0681705
1.185 1.92 0 0.0681705
1.27 1.27 0 0.0681705
1.27 1.44 0 0.0681705
1.27 1.92 0 0.0681705
1.44 1.44 0 0.0681705
1.44 1.92 0 0.0681705
1.92 0 1.92 0.0681705
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 8.61372e-05 9.44952e-06 0.0340853
0.34 5.12844e-05 1.33801e-05 0.0340853
0.425 4.3541e-05 1.4824e-05 0.0340853
0.51 3.88428e-05 1.54397e-05 0.0340853
0.595 3.34495e-05 1.78955e-05 0.0340853
0.68 3.09507e-05 1.8301e-05 0.0340853
0.765 2.52695e-05 2.19586e-05 0.0340853
0.85 2.37271e-05 2.22492e-05 0.0340853
1.02 2.19149e-05 2.261e-05 0.0340853
1.36 1.91487e-05 2.24345e-05 0.0340853
1.7 0 3.91595e-05 0.0340853
2.04 0 3.91595e-05 0.0340853
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 6.80777e-05 3.34433e-05 0.0340853
0.34 3.61876e-05 3.33933e-05 0.0340853
0.425 3.23648e-05 3.24802e-05 0.0340853
0.51 2.79091e-05 3.41271e-05 0.0340853
0.595 2.3655e-05 3.64674e-05 0.0340853
0.68 1.98402e-05 3.89822e-05 0.0340853
0.765 1.61768e-05 4.11339e-05 0.0340853
0.85 1.35702e-05 4.31009e-05 0.0340853
1.02 9.32626e-06 4.69828e-05 0.0340853
1.36 1.29978e-05 4.73246e-05 0.0340853
1.7 0 5.96826e-05 0.0340853
2.04 0 5.96818e-05 0.0340853
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 7.93746e-05 1.67654e-05 0.0340853
0.34 4.55879e-05 1.9837e-05 0.0340853
0.425 3.80076e-05 2.15216e-05 0.0340853
0.51 3.33286e-05 2.23055e-05 0.0340853
0.595 2.90274e-05 2.37905e-05 0.0340853
0.68 2.61838e-05 2.46021e-05 0.0340853
0.765 2.17494e-05 2.71055e-05 0.0340853
0.85 1.97574e-05 2.80056e-05 0.0340853
1.02 1.68608e-05 2.99991e-05 0.0340853
1.36 1.18524e-05 3.36875e-05 0.0340853
1.7 0 4.32588e-05 0.0340853
2.04 0 4.32588e-05 0.0340853
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 8.1339e-05 1.43746e-05 0.0340853
0.34 4.83253e-05 1.64574e-05 0.0340853
0.425 4.06995e-05 1.81761e-05 0.0340853
0.51 3.59956e-05 1.90192e-05 0.0340853
0.595 3.09877e-05 2.11822e-05 0.0340853
0.68 2.81327e-05 2.18956e-05 0.0340853
0.765 2.30317e-05 2.48824e-05 0.0340853
0.85 2.11752e-05 2.54048e-05 0.0340853
1.02 1.88539e-05 2.62139e-05 0.0340853
1.36 1.58653e-05 2.65591e-05 0.0340853
1.7 0 4.12234e-05 0.0340853
2.04 0 4.12234e-05 0.0340853
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 8.24722e-05 1.31413e-05 0.0340853
0.34 4.90302e-05 1.57381e-05 0.0340853
0.425 4.16521e-05 1.71229e-05 0.0340853
0.51 3.71326e-05 1.76188e-05 0.0340853
0.595 3.23129e-05 1.94861e-05 0.0340853
0.68 2.95651e-05 2.00547e-05 0.0340853
0.765 2.44851e-05 2.3032e-05 0.0340853
0.85 2.26448e-05 2.35791e-05 0.0340853
1.02 2.0326e-05 2.45073e-05 0.0340853
1.36 1.72821e-05 2.52146e-05 0.0340853
1.7 0 4.02602e-05 0.0340853
2.04 0 4.02602e-05 0.0340853
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 8.19265e-05 1.35744e-05 0.0340853
0.34 4.90529e-05 1.5458e-05 0.0340853
0.425 4.1736e-05 1.67972e-05 0.0340853
0.51 3.7272e-05 1.72522e-05 0.0340853
0.595 3.24866e-05 1.90445e-05 0.0340853
0.68 2.97193e-05 1.95578e-05 0.0340853
0.765 2.46764e-05 2.24312e-05 0.0340853
0.85 2.28305e-05 2.29498e-05 0.0340853
1.02 2.0544e-05 2.39104e-05 0.0340853
1.36 1.7595e-05 2.51078e-05 0.0340853
1.7 0 3.97983e-05 0.0340853
2.04 0 3.97982e-05 0.0340853
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 2.66887e-05 0.0340853
0.17 0 2.24007e-05 0.0340853
0.34 0 1.9211e-05 0.0340853
0.425 0 1.79128e-05 0.0340853
0.51 0 1.68696e-05 0.0340853
0.595 0 1.60676e-05 0.0340853
0.68 0 1.54732e-05 0.0340853
0.765 0 1.50473e-05 0.0340853
0.85 0 1.47528e-05 0.0340853
1.02 0 1.44392e-05 0.0340853
1.36 0 1.43783e-05 0.0340853
1.7 0 9.51316e-06 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 1.30121e-05 0.0340853
0.17 0 1.24717e-05 0.0340853
0.34 0 1.19979e-05 0.0340853
0.425 0 1.17403e-05 0.0340853
0.51 0 1.14754e-05 0.0340853
0.595 0 1.12057e-05 0.0340853
0.68 0 1.09324e-05 0.0340853
0.765 0 1.06556e-05 0.0340853
0.85 0 1.03755e-05 0.0340853
1.02 0 9.80591e-06 0.0340853
1.36 0 1.0251e-05 0.0340853
1.7 0 9.16462e-06 0.0340853
2.04 0 8.19109e-06 0.0340853
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 9.24997e-06 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 6.03723e-06 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00120566
0 0.23 0 0.00120566
0 0.37 0 0.00120566
0 0.53 0 0.00120566
0 0.6 0 0.00120566
0 0.74 0 0.00120566
0 0.9 0 0.00120566
0 0.97 0 0.00120566
0 1.11 0 0.00120566
0 1.48 0 0.00120566
0.23 0.23 0 0.00120566
0.23 0.37 0 0.00120566
0.23 0.53 0 0.00120566
0.23 0.6 0 0.00120566
0.23 0.74 0 0.00120566
0.23 0.9 0 0.00120566
0.23 0.97 0 0.00120566
0.23 1.11 0 0.00120566
0.23 1.48 0 0.00120566
0.37 0.37 0 0.00120566
0.37 0.53 0 0.00120566
0.37 0.6 0 0.00120566
0.37 0.74 0 0.00120566
0.37 0.9 0 0.00120566
0.37 0.97 0 0.00120566
0.37 1.11 0 0.00120566
0.37 1.48 0 0.00120566
0.53 0.53 0 0.00120566
0.53 0.6 0 0.00120566
0.53 0.74 0 0.00120566
0.53 0.9 0 0.00120566
0.53 0.97 0 0.00120566
0.53 1.11 0 0.00120566
0.53 1.48 0 0.00120566
0.6 0.6 0 0.00120566
0.6 0.74 0 0.00120566
0.6 0.9 0 0.00120566
0.6 0.97 0 0.00120566
0.6 1.11 0 0.00120566
0.6 1.48 0 0.00120566
0.74 0.74 0 0.00120566
0.74 0.9 0 0.00120566
0.74 0.97 0 0.00120566
0.74 1.11 0 0.00120566
0.74 1.48 0 0.00120566
0.9 0.9 0 0.00120566
0.9 0.97 0 0.00120566
0.9 1.11 0 0.00120566
0.9 1.48 0 0.00120566
0.97 0.97 0 0.00120566
0.97 1.11 0 0.00120566
0.97 1.48 0 0.00120566
1.11 1.11 0 0.00120566
1.11 1.48 0 0.00120566
1.48 0 1.48 0.00120566
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000138118 5.73561e-06 0.000602828
0.28 8.52281e-05 7.80545e-06 0.000602828
0.35 7.30176e-05 8.35076e-06 0.000602828
0.42 6.58219e-05 8.11883e-06 0.000602828
0.49 5.71535e-05 1.02824e-05 0.000602828
0.56 5.08842e-05 1.18282e-05 0.000602828
0.63 4.11549e-05 1.83851e-05 0.000602828
0.7 3.76403e-05 1.93881e-05 0.000602828
0.84 3.18492e-05 2.13832e-05 0.000602828
1.12 2.39134e-05 2.43226e-05 0.000602828
1.4 1.83959e-05 2.6658e-05 0.000602828
1.68 0 4.29842e-05 0.000602828
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000130654 1.567e-05 0.000602828
0.28 7.42447e-05 2.18678e-05 0.000602828
0.35 6.24752e-05 2.35482e-05 0.000602828
0.42 5.54264e-05 2.41468e-05 0.000602828
0.49 4.83787e-05 2.59601e-05 0.000602828
0.56 4.21914e-05 2.84295e-05 0.000602828
0.63 3.48531e-05 3.32113e-05 0.000602828
0.7 3.12986e-05 3.48401e-05 0.000602828
0.84 2.36804e-05 3.98139e-05 0.000602828
1.12 1.6881e-05 4.38251e-05 0.000602828
1.4 1.26539e-05 4.67742e-05 0.000602828
1.68 0 5.8778e-05 0.000602828
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000125315 2.16179e-05 0.000602828
0.28 6.95395e-05 2.85793e-05 0.000602828
0.35 5.66731e-05 3.2483e-05 0.000602828
0.42 4.79433e-05 3.60836e-05 0.000602828
0.49 4.07063e-05 3.92515e-05 0.000602828
0.56 3.44506e-05 4.25667e-05 0.000602828
0.63 2.73011e-05 4.77156e-05 0.000602828
0.7 2.39016e-05 4.955e-05 0.000602828
0.84 1.85187e-05 5.2665e-05 0.000602828
1.12 9.52476e-06 5.89915e-05 0.000602828
1.4 7.1476e-06 6.0619e-05 0.000602828
1.68 0 6.7952e-05 0.000602828
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000130705 1.50119e-05 0.000602828
0.28 7.79806e-05 1.64308e-05 0.000602828
0.35 6.60048e-05 1.74046e-05 0.000602828
0.42 5.88336e-05 1.74203e-05 0.000602828
0.49 5.20059e-05 1.8409e-05 0.000602828
0.56 4.54686e-05 2.03003e-05 0.000602828
0.63 3.79594e-05 2.46138e-05 0.000602828
0.7 3.42363e-05 2.57893e-05 0.000602828
0.84 2.82732e-05 2.79929e-05 0.000602828
1.12 2.04041e-05 3.13738e-05 0.000602828
1.4 1.49853e-05 3.43422e-05 0.000602828
1.68 0 4.79875e-05 0.000602828
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000132208 1.2287e-05 0.000602828
0.28 8.20972e-05 1.12027e-05 0.000602828
0.35 6.98093e-05 1.22795e-05 0.000602828
0.42 6.24113e-05 1.21279e-05 0.000602828
0.49 5.46395e-05 1.37539e-05 0.000602828
0.56 4.82341e-05 1.53582e-05 0.000602828
0.63 3.98791e-05 2.04812e-05 0.000602828
0.7 3.64359e-05 2.14036e-05 0.000602828
0.84 3.09173e-05 2.32351e-05 0.000602828
1.12 2.32619e-05 2.6199e-05 0.000602828
1.4 1.74854e-05 2.89191e-05 0.000602828
1.68 0 4.43916e-05 0.000602828
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000129054 1.46584e-05 0.000602828
0.28 7.94672e-05 1.26295e-05 0.000602828
0.35 6.82334e-05 1.28446e-05 0.000602828
0.42 6.16935e-05 1.22491e-05 0.000602828
0.49 5.4609e-05 1.35439e-05 0.000602828
0.56 4.85906e-05 1.49208e-05 0.000602828
0.63 4.0474e-05 1.9796e-05 0.000602828
0.7 3.71105e-05 2.05385e-05 0.000602828
0.84 3.16873e-05 2.20032e-05 0.000602828
1.12 2.4533e-05 2.42645e-05 0.000602828
1.4 1.95902e-05 2.6429e-05 0.000602828
1.68 0 4.43317e-05 0.000602828
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 3.31347e-05 0.000602828
0.14 0 2.73289e-05 0.000602828
0.28 0 2.33157e-05 0.000602828
0.35 0 2.14946e-05 0.000602828
0.42 0 1.99143e-05 0.000602828
0.49 0 1.8593e-05 0.000602828
0.56 0 1.71886e-05 0.000602828
0.63 0 1.63751e-05 0.000602828
0.7 0 1.57544e-05 0.000602828
0.84 0 1.49643e-05 0.000602828
1.12 0 1.45003e-05 0.000602828
1.4 0 1.4692e-05 0.000602828
1.68 0 1.49947e-05 0.000602828
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.71233e-05 0.000602828
0.14 0 1.6158e-05 0.000602828
0.28 0 1.57688e-05 0.000602828
0.35 0 1.55375e-05 0.000602828
0.42 0 1.52888e-05 0.000602828
0.49 0 1.50272e-05 0.000602828
0.56 0 1.44808e-05 0.000602828
0.63 0 1.4219e-05 0.000602828
0.7 0 1.39606e-05 0.000602828
0.84 0 1.34715e-05 0.000602828
1.12 0 1.26613e-05 0.000602828
1.4 0 1.20702e-05 0.000602828
1.68 0 1.16482e-05 0.000602828
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 9.81043e-06 0.000602828
0.14 0 9.44235e-06 0.000602828
0.28 0 9.37367e-06 0.000602828
0.35 0 9.33254e-06 0.000602828
0.42 0 9.28864e-06 0.000602828
0.49 0 9.24217e-06 0.000602828
0.56 0 9.02038e-06 0.000602828
0.63 0 8.97284e-06 0.000602828
0.7 0 8.92341e-06 0.000602828
0.84 0 8.81955e-06 0.000602828
1.12 0 8.59823e-06 0.000602828
1.4 0 8.37071e-06 0.000602828
1.68 0 0 0.000602828
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 8.57973e-06 0.000602828
0.14 0 0 0.000602828
0.28 0 0 0.000602828
0.35 0 0 0.000602828
0.42 0 0 0.000602828
0.49 0 0 0.000602828
0.56 0 0 0.000602828
0.63 0 0 0.000602828
0.7 0 0 0.000602828
0.84 0 0 0.000602828
1.12 0 0 0.000602828
1.4 0 0 0.000602828
1.68 0 0 0.000602828
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000119372 3.57253e-05 0.000602828
0.28 6.27954e-05 4.44719e-05 0.000602828
0.35 4.88178e-05 5.08946e-05 0.000602828
0.42 3.95403e-05 5.63268e-05 0.000602828
0.49 3.34018e-05 6.23328e-05 0.000602828
0.56 2.73394e-05 6.6527e-05 0.000602828
0.63 2.16318e-05 7.10757e-05 0.000602828
0.7 1.83906e-05 7.35041e-05 0.000602828
0.84 1.35103e-05 7.73619e-05 0.000602828
1.12 8.4057e-06 8.16741e-05 0.000602828
1.4 6.46386e-06 8.30622e-05 0.000602828
1.68 0 8.8504e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000124988 2.29842e-05 0.000602828
0.28 6.90886e-05 2.85542e-05 0.000602828
0.35 5.76192e-05 3.0258e-05 0.000602828
0.42 5.06751e-05 3.09869e-05 0.000602828
0.49 4.45953e-05 3.23341e-05 0.000602828
0.56 3.82076e-05 3.51534e-05 0.000602828
0.63 3.19793e-05 3.88739e-05 0.000602828
0.7 2.82205e-05 4.07125e-05 0.000602828
0.84 2.02291e-05 4.60782e-05 0.000602828
1.12 1.35021e-05 5.02313e-05 0.000602828
1.4 9.5176e-06 5.33196e-05 0.000602828
1.68 0 6.26264e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000126034 2.05039e-05 0.000602828
0.28 7.19999e-05 2.42552e-05 0.000602828
0.35 6.00408e-05 2.63318e-05 0.000602828
0.42 5.27087e-05 2.71038e-05 0.000602828
0.49 4.60601e-05 2.87162e-05 0.000602828
0.56 3.97624e-05 3.12743e-05 0.000602828
0.63 3.32514e-05 3.52182e-05 0.000602828
0.7 2.9778e-05 3.67814e-05 0.000602828
0.84 2.22918e-05 4.17105e-05 0.000602828
1.12 1.59869e-05 4.53682e-05 0.000602828
1.4 1.17684e-05 4.82969e-05 0.000602828
1.68 0 5.93339e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000124315 2.20393e-05 0.000602828
0.28 7.07847e-05 2.48307e-05 0.000602828
0.35 5.91661e-05 2.66924e-05 0.000602828
0.42 5.21487e-05 2.73862e-05 0.000602828
0.49 4.57906e-05 2.8894e-05 0.000602828
0.56 3.97363e-05 3.12372e-05 0.000602828
0.63 3.33777e-05 3.49493e-05 0.000602828
0.7 3.0004e-05 3.62833e-05 0.000602828
0.84 2.26829e-05 4.077e-05 0.000602828
1.12 1.67524e-05 4.38231e-05 0.000602828
1.4 1.29366e-05 4.64806e-05 0.000602828
1.68 0 5.88991e-05 0.000602828
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00122133
0 0.34 0 0.00122133
0 0.48 0 0.00122133
0 0.75 0 0.00122133
0 0.82 0 0.00122133
0 0.96 0 0.00122133
0 1.23 0 0.00122133
0 1.3 0 0.00122133
0 1.44 0 0.00122133
0 1.92 0 0.00122133
0.34 0.34 0 0.00122133
0.34 0.48 0 0.00122133
0.34 0.75 0 0.00122133
0.34 0.82 0 0.00122133
0.34 0.96 0 0.00122133
0.34 1.23 0 0.00122133
0.34 1.3 0 0.00122133
0.34 1.44 0 0.00122133
0.34 1.92 0 0.00122133
0.48 0.48 0 0.00122133
0.48 0.75 0 0.00122133
0.48 0.82 0 0.00122133
0.48 0.96 0 0.00122133
0.48 1.23 0 0.00122133
0.48 1.3 0 0.00122133
0.48 1.44 0 0.00122133
0.48 1.92 0 0.00122133
0.75 0.75 0 0.00122133
0.75 0.82 0 0.00122133
0.75 0.96 0 0.00122133
0.75 1.23 0 0.00122133
0.75 1.3 0 0.00122133
0.75 1.44 0 0.00122133
0.75 1.92 0 0.00122133
0.82 0.82 0 0.00122133
0.82 0.96 0 0.00122133
0.82 1.23 0 0.00122133
0.82 1.3 0 0.00122133
0.82 1.44 0 0.00122133
0.82 1.92 0 0.00122133
0.96 0.96 0 0.00122133
0.96 1.23 0 0.00122133
0.96 1.3 0 0.00122133
0.96 1.44 0 0.00122133
0.96 1.92 0 0.00122133
1.23 1.23 0 0.00122133
1.23 1.3 0 0.00122133
1.23 1.44 0 0.00122133
1.23 1.92 0 0.00122133
1.3 1.3 0 0.00122133
1.3 1.44 0 0.00122133
1.3 1.92 0 0.00122133
1.44 1.44 0 0.00122133
1.44 1.92 0 0.00122133
1.92 0 1.92 0.00122133
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000136816 6.4904e-06 0.000610664
0.28 8.34141e-05 9.07691e-06 0.000610664
0.35 7.14996e-05 9.78972e-06 0.000610664
0.42 6.58888e-05 8.30119e-06 0.000610664
0.49 5.83556e-05 9.50429e-06 0.000610664
0.56 4.70158e-05 1.65661e-05 0.000610664
0.63 4.32143e-05 1.7029e-05 0.000610664
0.7 4.01096e-05 1.74903e-05 0.000610664
0.84 3.52495e-05 1.84518e-05 0.000610664
1.12 2.83e-05 2.04259e-05 0.000610664
1.4 2.35213e-05 2.18521e-05 0.000610664
1.68 0 4.29564e-05 0.000610664
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000127192 1.69995e-05 0.000610664
0.28 7.66247e-05 1.63418e-05 0.000610664
0.35 6.50566e-05 1.70294e-05 0.000610664
0.42 5.90549e-05 1.62173e-05 0.000610664
0.49 5.32273e-05 1.65602e-05 0.000610664
0.56 4.46891e-05 2.114e-05 0.000610664
0.63 4.07293e-05 2.19278e-05 0.000610664
0.7 3.74585e-05 2.26078e-05 0.000610664
0.84 3.23579e-05 2.37641e-05 0.000610664
1.12 2.54578e-05 2.5716e-05 0.000610664
1.4 2.10804e-05 2.71969e-05 0.000610664
1.68 0 4.64982e-05 0.000610664
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000124423 2.32963e-05 0.000610664
0.28 6.96191e-05 2.85508e-05 0.000610664
0.35 5.56138e-05 3.34378e-05 0.000610664
0.42 4.92953e-05 3.40191e-05 0.000610664
0.49 4.27985e-05 3.56844e-05 0.000610664
0.56 3.40381e-05 4.10225e-05 0.000610664
0.63 2.98499e-05 4.25768e-05 0.000610664
0.7 2.64613e-05 4.39629e-05 0.000610664
0.84 2.01626e-05 4.76138e-05 0.000610664
1.12 1.40572e-05 5.12535e-05 0.000610664
1.4 1.08465e-05 5.32306e-05 0.000610664
1.68 0 6.30477e-05 0.000610664
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000126123 1.95052e-05 0.000610664
0.28 7.26959e-05 2.23848e-05 0.000610664
0.35 5.95301e-05 2.56742e-05 0.000610664
0.42 5.08436e-05 2.8336e-05 0.000610664
0.49 4.43139e-05 3.00085e-05 0.000610664
0.56 3.54721e-05 3.54467e-05 0.000610664
0.63 3.14061e-05 3.68564e-05 0.000610664
0.7 2.81522e-05 3.8015e-05 0.000610664
0.84 2.33034e-05 3.98469e-05 0.000610664
1.12 1.70668e-05 4.26181e-05 0.000610664
1.4 1.30512e-05 4.46023e-05 0.000610664
1.68 0 5.62342e-05 0.000610664
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000128808 1.51914e-05 0.000610664
0.28 7.72605e-05 1.52063e-05 0.000610664
0.35 6.57281e-05 1.59295e-05 0.000610664
0.42 5.97961e-05 1.5065e-05 0.000610664
0.49 5.40428e-05 1.52938e-05 0.000610664
0.56 4.55078e-05 1.98013e-05 0.000610664
0.63 4.15542e-05 2.05024e-05 0.000610664
0.7 3.82674e-05 2.11168e-05 0.000610664
0.84 3.30494e-05 2.22271e-05 0.000610664
1.12 2.56053e-05 2.43909e-05 0.000610664
1.4 2.05985e-05 2.61987e-05 0.000610664
1.68 0 4.48263e-05 0.000610664
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000131355 1.24995e-05 0.000610664
0.28 8.05674e-05 1.16327e-05 0.000610664
0.35 6.90668e-05 1.23992e-05 0.000610664
0.42 6.29339e-05 1.15131e-05 0.000610664
0.49 5.61372e-05 1.25383e-05 0.000610664
0.56 4.63299e-05 1.80852e-05 0.000610664
0.63 4.22832e-05 1.87244e-05 0.000610664
0.7 3.8944e-05 1.93101e-05 0.000610664
0.84 3.37351e-05 2.04174e-05 0.000610664
1.12 2.65995e-05 2.25418e-05 0.000610664
1.4 2.1936e-05 2.41638e-05 0.000610664
1.68 0 4.40076e-05 0.000610664
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.89764e-05 0.000610664
0.14 0 2.70012e-05 0.000610664
0.28 0 2.51016e-05 0.000610664
0.35 0 2.40922e-05 0.000610664
0.42 0 2.30957e-05 0.000610664
0.49 0 2.21433e-05 0.000610664
0.56 0 2.12575e-05 0.000610664
0.63 0 2.04523e-05 0.000610664
0.7 0 1.97342e-05 0.000610664
0.84 0 1.85571e-05 0.000610664
1.12 0 1.70525e-05 0.000610664
1.4 0 1.62383e-05 0.000610664
1.68 0 1.57202e-05 0.000610664
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.23209e-05 0.000610664
0.14 0 1.19729e-05 0.000610664
0.28 0 1.18364e-05 0.000610664
0.35 0 1.1765e-05 0.000610664
0.42 0 1.1692e-05 0.000610664
0.49 0 1.16174e-05 0.000610664
0.56 0 1.15415e-05 0.000610664
0.63 0 1.14645e-05 0.000610664
0.7 0 1.13866e-05 0.000610664
0.84 0 1.12286e-05 0.000610664
1.12 0 1.09062e-05 0.000610664
1.4 0 1.05776e-05 0.000610664
1.68 0 1.02431e-05 0.000610664
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.0436e-05 0.000610664
0.14 0 1.03181e-05 0.000610664
0.28 0 1.02827e-05 0.000610664
0.35 0 1.02641e-05 0.000610664
0.42 0 1.0245e-05 0.000610664
0.49 0 1.02253e-05 0.000610664
0.56 0 1.0205e-05 0.000610664
0.63 0 1.01841e-05 0.000610664
0.7 0 1.01626e-05 0.000610664
0.84 0 1.01175e-05 0.000610664
1.12 0 1.00172e-05 0.000610664
1.4 0 9.8733e-06 0.000610664
1.68 0 9.58175e-06 0.000610664
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000121272 2.58426e-05 0.000610664
0.28 6.86112e-05 2.78188e-05 0.000610664
0.35 5.54947e-05 3.12117e-05 0.000610664
0.42 4.65322e-05 3.42706e-05 0.000610664
0.49 4.08755e-05 3.55205e-05 0.000610664
0.56 3.35405e-05 3.96486e-05 0.000610664
0.63 2.94009e-05 4.12735e-05 0.000610664
0.7 2.60535e-05 4.26151e-05 0.000610664
0.84 2.10025e-05 4.47461e-05 0.000610664
1.12 1.4424e-05 4.80529e-05 0.000610664
1.4 1.03605e-05 5.03658e-05 0.000610664
1.68 0 5.95973e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000123453 2.16163e-05 0.000610664
0.28 7.35216e-05 1.98995e-05 0.000610664
0.35 6.18244e-05 2.10267e-05 0.000610664
0.42 5.53367e-05 2.0826e-05 0.000610664
0.49 5.02035e-05 2.08249e-05 0.000610664
0.56 4.30336e-05 2.41143e-05 0.000610664
0.63 3.89508e-05 2.5055e-05 0.000610664
0.7 3.55934e-05 2.58272e-05 0.000610664
0.84 3.04001e-05 2.70796e-05 0.000610664
1.12 2.34671e-05 2.92113e-05 0.000610664
1.4 1.90797e-05 3.10369e-05 0.000610664
1.68 0 4.87429e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000124949 1.96143e-05 0.000610664
0.28 7.52264e-05 1.76242e-05 0.000610664
0.35 6.37136e-05 1.85306e-05 0.000610664
0.42 5.72626e-05 1.81979e-05 0.000610664
0.49 5.17016e-05 1.85489e-05 0.000610664
0.56 4.39077e-05 2.23637e-05 0.000610664
0.63 3.9734e-05 2.33058e-05 0.000610664
0.7 3.62877e-05 2.4091e-05 0.000610664
0.84 3.09712e-05 2.53663e-05 0.000610664
1.12 2.40379e-05 2.745e-05 0.000610664
1.4 1.97744e-05 2.91518e-05 0.000610664
1.68 0 4.74739e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000115608 3.50312e-05 0.000610664
0.28 5.83119e-05 4.55418e-05 0.000610664
0.35 4.49743e-05 5.09966e-05 0.000610664
0.42 3.77431e-05 5.36392e-05 0.000610664
0.49 3.17863e-05 5.8277e-05 0.000610664
0.56 2.4851e-05 6.28011e-05 0.000610664
0.63 2.09385e-05 6.49097e-05 0.000610664
0.7 1.79023e-05 6.66157e-05 0.000610664
0.84 1.3077e-05 6.97887e-05 0.000610664
1.12 8.49625e-06 7.31327e-05 0.000610664
1.4 6.21704e-06 7.4809e-05 0.000610664
1.68 0 8.01802e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000119812 2.94677e-05 0.000610664
0.28 6.54912e-05 3.40758e-05 0.000610664
0.35 5.13057e-05 3.94727e-05 0.000610664
0.42 4.45564e-05 4.07913e-05 0.000610664
0.49 3.88127e-05 4.2283e-05 0.000610664
0.56 3.15132e-05 4.63845e-05 0.000610664
0.63 2.72338e-05 4.81364e-05 0.000610664
0.7 2.37708e-05 4.96133e-05 0.000610664
0.84 1.73816e-05 5.3278e-05 0.000610664
1.12 1.12978e-05 5.68197e-05 0.000610664
1.4 8.22247e-06 5.88459e-05 0.000610664
1.68 0 6.6398e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000121356 2.66641e-05 0.000610664
0.28 6.77499e-05 3.03143e-05 0.000610664
0.35 5.37608e-05 3.54326e-05 0.000610664
0.42 4.70926e-05 3.64729e-05 0.000610664
0.49 4.08946e-05 3.81779e-05 0.000610664
0.56 3.29078e-05 4.27905e-05 0.000610664
0.63 2.85927e-05 4.44477e-05 0.000610664
0.7 2.51025e-05 4.58613e-05 0.000610664
0.84 1.86949e-05 4.94652e-05 0.000610664
1.12 1.26703e-05 5.29469e-05 0.000610664
1.4 9.66659e-06 5.48745e-05 0.000610664
1.68 0 6.37319e-05 0.000610664
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000166283
0 0.44 0 0.000166283
0 0.74 0 0.000166283
0 1.03 0 0.000166283
0 1.18 0 0.000166283
0 1.48 0 0.000166283
0 1.77 0 0.000166283
0 1.92 0 0.000166283
0 2.22 0 0.000166283
0 2.96 0 0.000166283
0.44 0.44 0 0.000166283
0.44 0.74 0 0.000166283
0.44 1.03 0 0.000166283
0.44 1.18 0 0.000166283
0.44 1.48 0 0.000166283
0.44 1.77 0 0.000166283
0.44 1.92 0 0.000166283
0.44 2.22 0 0.000166283
0.44 2.96 0 0.000166283
0.74 0.74 0 0.000166283
0.74 1.03 0 0.000166283
0.74 1.18 0 0.000166283
0.74 1.48 0 0.000166283
0.74 1.77 0 0.000166283
0.74 1.92 0 0.000166283
0.74 2.22 0 0.000166283
0.74 2.96 0 0.000166283
1.03 1.03 0 0.000166283
1.03 1.18 0 0.000166283
1.03 1.48 0 0.000166283
1.03 1.77 0 0.000166283
1.03 1.92 0 0.000166283
1.03 2.22 0 0.000166283
1.03 2.96 0 0.000166283
1.18 1.18 0 0.000166283
1.18 1.48 0 0.000166283
1.18 1.77 0 0.000166283
1.18 1.92 0 0.000166283
1.18 2.22 0 0.000166283
1.18 2.96 0 0.000166283
1.48 1.48 0 0.000166283
1.48 1.77 0 0.000166283
1.48 1.92 0 0.000166283
1.48 2.22 0 0.000166283
1.48 2.96 0 0.000166283
1.77 1.77 0 0.000166283
1.77 1.92 0 0.000166283
1.77 2.22 0 0.000166283
1.77 2.96 0 0.000166283
1.92 1.92 0 0.000166283
1.92 2.22 0 0.000166283
1.92 2.96 0 0.000166283
2.22 2.22 0 0.000166283
2.22 2.96 0 0.000166283
2.96 0 2.96 0.000166283
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00014806 6.0032e-06 8.31416e-05
0.6 8.72099e-05 8.08133e-06 8.31416e-05
0.75 7.37384e-05 9.38141e-06 8.31416e-05
0.9 6.50704e-05 1.01538e-05 8.31416e-05
1.05 5.63535e-05 1.19692e-05 8.31416e-05
1.2 4.99443e-05 1.33485e-05 8.31416e-05
1.35 4.57542e-05 1.41569e-05 8.31416e-05
1.5 3.71365e-05 2.01545e-05 8.31416e-05
1.8 3.21699e-05 2.13106e-05 8.31416e-05
2.4 2.52504e-05 2.33487e-05 8.31416e-05
3 1.95583e-05 2.58394e-05 8.31416e-05
3.6 0 4.34504e-05 8.31416e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.00014111 1.38723e-05 8.31416e-05
0.6 8.1707e-05 1.43318e-05 8.31416e-05
0.75 6.84653e-05 1.55604e-05 8.31416e-05
0.9 6.02964e-05 1.57031e-05 8.31416e-05
1.05 5.3374e-05 1.62431e-05 8.31416e-05
1.2 4.68504e-05 1.79145e-05 8.31416e-05
1.35 4.25354e-05 1.89832e-05 8.31416e-05
1.5 3.61744e-05 2.28577e-05 8.31416e-05
1.8 3.09981e-05 2.44961e-05 8.31416e-05
2.4 2.4072e-05 2.71202e-05 8.31416e-05
3 1.86949e-05 2.98237e-05 8.31416e-05
3.6 0 4.6886e-05 8.31416e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000140269 1.5854e-05 8.31416e-05
0.6 7.95803e-05 1.82502e-05 8.31416e-05
0.75 6.60577e-05 2.0166e-05 8.31416e-05
0.9 5.75943e-05 2.08744e-05 8.31416e-05
1.05 5.04916e-05 2.17562e-05 8.31416e-05
1.2 4.40156e-05 2.35596e-05 8.31416e-05
1.35 3.97364e-05 2.47136e-05 8.31416e-05
1.5 3.3428e-05 2.86658e-05 8.31416e-05
1.8 2.82882e-05 3.05424e-05 8.31416e-05
2.4 2.12886e-05 3.37244e-05 8.31416e-05
3 1.59798e-05 3.67443e-05 8.31416e-05
3.6 0 5.13943e-05 8.31416e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000134986 2.28838e-05 8.31416e-05
0.6 6.96619e-05 3.38989e-05 8.31416e-05
0.75 5.72228e-05 3.7435e-05 8.31416e-05
0.9 4.84984e-05 4.06081e-05 8.31416e-05
1.05 4.09459e-05 4.37168e-05 8.31416e-05
1.2 3.44564e-05 4.69265e-05 8.31416e-05
1.35 3.02674e-05 4.88497e-05 8.31416e-05
1.5 2.42707e-05 5.31037e-05 8.31416e-05
1.8 2.00089e-05 5.48545e-05 8.31416e-05
2.4 1.37294e-05 5.79563e-05 8.31416e-05
3 9.76125e-06 6.05071e-05 8.31416e-05
3.6 0 7.07783e-05 8.31416e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000135316 2.36301e-05 8.31416e-05
0.6 6.7595e-05 3.84026e-05 8.31416e-05
0.75 5.37506e-05 4.24264e-05 8.31416e-05
0.9 4.48935e-05 4.50291e-05 8.31416e-05
1.05 3.71003e-05 4.78004e-05 8.31416e-05
1.2 3.05564e-05 5.08231e-05 8.31416e-05
1.35 2.61856e-05 5.28313e-05 8.31416e-05
1.5 2.00076e-05 5.73068e-05 8.31416e-05
1.8 1.53513e-05 5.98066e-05 8.31416e-05
2.4 1.05063e-05 6.30361e-05 8.31416e-05
3 7.41771e-06 6.59394e-05 8.31416e-05
3.6 0 7.35747e-05 8.31416e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000140175 1.46544e-05 8.31416e-05
0.6 7.96936e-05 1.62943e-05 8.31416e-05
0.75 6.66489e-05 1.76954e-05 8.31416e-05
0.9 5.85025e-05 1.82527e-05 8.31416e-05
1.05 5.14615e-05 1.91808e-05 8.31416e-05
1.2 4.47278e-05 2.11824e-05 8.31416e-05
1.35 4.00772e-05 2.25606e-05 8.31416e-05
1.5 3.34277e-05 2.66501e-05 8.31416e-05
1.8 2.76247e-05 2.87572e-05 8.31416e-05
2.4 2.01469e-05 3.18759e-05 8.31416e-05
3 1.50997e-05 3.45089e-05 8.31416e-05
3.6 0 4.83455e-05 8.31416e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 3.85072e-05 8.31416e-05
0.3 0 3.01556e-05 8.31416e-05
0.6 0 2.5149e-05 8.31416e-05
0.75 0 2.30367e-05 8.31416e-05
0.9 0 2.12534e-05 8.31416e-05
1.05 0 1.9782e-05 8.31416e-05
1.2 0 1.82214e-05 8.31416e-05
1.35 0 1.72774e-05 8.31416e-05
1.5 0 1.65106e-05 8.31416e-05
1.8 0 1.53432e-05 8.31416e-05
2.4 0 1.36758e-05 8.31416e-05
3 0 1.22058e-05 8.31416e-05
3.6 0 1.081e-05 8.31416e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 2.21675e-05 8.31416e-05
0.3 0 2.00002e-05 8.31416e-05
0.6 0 1.91215e-05 8.31416e-05
0.75 0 1.86582e-05 8.31416e-05
0.9 0 1.81798e-05 8.31416e-05
1.05 0 1.76901e-05 8.31416e-05
1.2 0 1.68822e-05 8.31416e-05
1.35 0 1.63993e-05 8.31416e-05
1.5 0 1.59259e-05 8.31416e-05
1.8 0 1.50316e-05 8.31416e-05
2.4 0 1.35353e-05 8.31416e-05
3 0 1.24338e-05 8.31416e-05
3.6 0 1.16745e-05 8.31416e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.00013111 2.80842e-05 8.31416e-05
0.6 6.3731e-05 4.26296e-05 8.31416e-05
0.75 4.98984e-05 4.67934e-05 8.31416e-05
0.9 4.12459e-05 4.91916e-05 8.31416e-05
1.05 3.44301e-05 5.13265e-05 8.31416e-05
1.2 2.79386e-05 5.44243e-05 8.31416e-05
1.35 2.36e-05 5.64935e-05 8.31416e-05
1.5 1.87452e-05 5.97169e-05 8.31416e-05
1.8 1.41858e-05 6.2241e-05 8.31416e-05
2.4 9.61199e-06 6.5411e-05 8.31416e-05
3 6.7497e-06 6.83087e-05 8.31416e-05
3.6 0 7.54357e-05 8.31416e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000136187 1.91389e-05 8.31416e-05
0.6 7.62508e-05 2.01372e-05 8.31416e-05
0.75 6.32123e-05 2.166e-05 8.31416e-05
0.9 5.52146e-05 2.19936e-05 8.31416e-05
1.05 4.90399e-05 2.23067e-05 8.31416e-05
1.2 4.23351e-05 2.43965e-05 8.31416e-05
1.35 3.77281e-05 2.58409e-05 8.31416e-05
1.5 3.23347e-05 2.88066e-05 8.31416e-05
1.8 2.65807e-05 3.11811e-05 8.31416e-05
2.4 1.90483e-05 3.50262e-05 8.31416e-05
3 1.38838e-05 3.82661e-05 8.31416e-05
3.6 0 5.10799e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000130463 3.46028e-05 8.31416e-05
0.6 6.14767e-05 5.13019e-05 8.31416e-05
0.75 4.76882e-05 5.56297e-05 8.31416e-05
0.9 3.90712e-05 5.83052e-05 8.31416e-05
1.05 3.22341e-05 6.07652e-05 8.31416e-05
1.2 2.57497e-05 6.41631e-05 8.31416e-05
1.35 2.13483e-05 6.64895e-05 8.31416e-05
1.5 1.64351e-05 6.99231e-05 8.31416e-05
1.8 1.16403e-05 7.28914e-05 8.31416e-05
2.4 6.74808e-06 7.66804e-05 8.31416e-05
3 4.16879e-06 7.95897e-05 8.31416e-05
3.6 0 8.44473e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000135514 2.16781e-05 8.31416e-05
0.6 7.419e-05 2.46774e-05 8.31416e-05
0.75 6.09601e-05 2.66896e-05 8.31416e-05
0.9 5.27865e-05 2.74323e-05 8.31416e-05
1.05 4.65146e-05 2.8029e-05 8.31416e-05
1.2 3.99084e-05 3.02435e-05 8.31416e-05
1.35 3.53859e-05 3.17739e-05 8.31416e-05
1.5 3.00802e-05 3.48175e-05 8.31416e-05
1.8 2.44429e-05 3.73692e-05 8.31416e-05
2.4 1.69841e-05 4.15359e-05 8.31416e-05
3 1.19713e-05 4.48686e-05 8.31416e-05
3.6 0 5.59586e-05 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000124023 4.81241e-05 8.31416e-05
0.6 5.5732e-05 6.81708e-05 8.31416e-05
0.75 4.23479e-05 7.49865e-05 8.31416e-05
0.9 3.3955e-05 7.98024e-05 8.31416e-05
1.05 2.75282e-05 8.64411e-05 8.31416e-05
1.2 2.18668e-05 9.0314e-05 8.31416e-05
1.35 1.83112e-05 9.26748e-05 8.31416e-05
1.5 1.43465e-05 9.57613e-05 8.31416e-05
1.8 1.10711e-05 9.77788e-05 8.31416e-05
2.4 7.06034e-06 0.000100394 8.31416e-05
3 4.69938e-06 0.000103191 8.31416e-05
3.6 0 0.000110319 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000130844 2.78049e-05 8.31416e-05
0.6 6.47308e-05 4.00049e-05 8.31416e-05
0.75 5.24353e-05 4.338e-05 8.31416e-05
0.9 4.37548e-05 4.66835e-05 8.31416e-05
1.05 3.70952e-05 4.97306e-05 8.31416e-05
1.2 2.80431e-05 5.45739e-05 8.31416e-05
1.35 2.3947e-05 5.67216e-05 8.31416e-05
1.5 1.93211e-05 5.98575e-05 8.31416e-05
1.8 1.49852e-05 6.20868e-05 8.31416e-05
2.4 8.75022e-06 6.57655e-05 8.31416e-05
3 5.19751e-06 6.83347e-05 8.31416e-05
3.6 0 7.4217e-05 8.31416e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000168094
0 0.66 0 0.000168094
0 0.96 0 0.000168094
0 1.47 0 0.000168094
0 1.62 0 0.000168094
0 1.92 0 0.000168094
0 2.43 0 0.000168094
0 2.58 0 0.000168094
0 2.88 0 0.000168094
0 3.84 0 0.000168094
0.66 0.66 0 0.000168094
0.66 0.96 0 0.000168094
0.66 1.47 0 0.000168094
0.66 1.62 0 0.000168094
0.66 1.92 0 0.000168094
0.66 2.43 0 0.000168094
0.66 2.58 0 0.000168094
0.66 2.88 0 0.000168094
0.66 3.84 0 0.000168094
0.96 0.96 0 0.000168094
0.96 1.47 0 0.000168094
0.96 1.62 0 0.000168094
0.96 1.92 0 0.000168094
0.96 2.43 0 0.000168094
0.96 2.58 0 0.000168094
0.96 2.88 0 0.000168094
0.96 3.84 0 0.000168094
1.47 1.47 0 0.000168094
1.47 1.62 0 0.000168094
1.47 1.92 0 0.000168094
1.47 2.43 0 0.000168094
1.47 2.58 0 0.000168094
1.47 2.88 0 0.000168094
1.47 3.84 0 0.000168094
1.62 1.62 0 0.000168094
1.62 1.92 0 0.000168094
1.62 2.43 0 0.000168094
1.62 2.58 0 0.000168094
1.62 2.88 0 0.000168094
1.62 3.84 0 0.000168094
1.92 1.92 0 0.000168094
1.92 2.43 0 0.000168094
1.92 2.58 0 0.000168094
1.92 2.88 0 0.000168094
1.92 3.84 0 0.000168094
2.43 2.43 0 0.000168094
2.43 2.58 0 0.000168094
2.43 2.88 0 0.000168094
2.43 3.84 0 0.000168094
2.58 2.58 0 0.000168094
2.58 2.88 0 0.000168094
2.58 3.84 0 0.000168094
2.88 2.88 0 0.000168094
2.88 3.84 0 0.000168094
3.84 0 3.84 0.000168094
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000146568 5.02495e-06 8.4047e-05
0.6 8.65107e-05 7.72704e-06 8.4047e-05
0.75 7.44525e-05 8.10027e-06 8.4047e-05
0.9 6.91912e-05 6.92988e-06 8.4047e-05
1.05 6.10527e-05 7.63648e-06 8.4047e-05
1.2 4.90899e-05 1.52999e-05 8.4047e-05
1.35 4.47325e-05 1.6183e-05 8.4047e-05
1.5 4.10382e-05 1.70125e-05 8.4047e-05
1.8 3.51456e-05 1.84732e-05 8.4047e-05
2.4 2.72684e-05 2.05896e-05 8.4047e-05
3 2.27245e-05 2.16227e-05 8.4047e-05
3.6 0 4.21628e-05 8.4047e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000139132 1.26134e-05 8.4047e-05
0.6 8.14751e-05 1.24631e-05 8.4047e-05
0.75 6.96557e-05 1.26639e-05 8.4047e-05
0.9 6.39559e-05 1.16561e-05 8.4047e-05
1.05 5.80155e-05 1.14228e-05 8.4047e-05
1.2 4.84838e-05 1.68488e-05 8.4047e-05
1.35 4.4164e-05 1.77571e-05 8.4047e-05
1.5 4.04466e-05 1.85645e-05 8.4047e-05
1.8 3.44414e-05 1.98822e-05 8.4047e-05
2.4 2.65257e-05 2.16293e-05 8.4047e-05
3 2.22986e-05 2.24663e-05 8.4047e-05
3.6 0 4.30286e-05 8.4047e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000138894 1.35323e-05 8.4047e-05
0.6 8.12519e-05 1.35359e-05 8.4047e-05
0.75 6.93507e-05 1.41118e-05 8.4047e-05
0.9 6.32992e-05 1.31999e-05 8.4047e-05
1.05 5.69962e-05 1.29368e-05 8.4047e-05
1.2 4.73217e-05 1.82256e-05 8.4047e-05
1.35 4.29978e-05 1.90478e-05 8.4047e-05
1.5 3.93936e-05 1.98249e-05 8.4047e-05
1.8 3.37407e-05 2.12537e-05 8.4047e-05
2.4 2.61844e-05 2.36108e-05 8.4047e-05
3 2.15726e-05 2.51067e-05 8.4047e-05
3.6 0 4.46569e-05 8.4047e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000140746 1.25047e-05 8.4047e-05
0.6 8.04344e-05 1.50092e-05 8.4047e-05
0.75 6.85846e-05 1.55484e-05 8.4047e-05
0.9 6.25594e-05 1.46735e-05 8.4047e-05
1.05 5.62133e-05 1.45239e-05 8.4047e-05
1.2 4.70636e-05 1.9347e-05 8.4047e-05
1.35 4.25966e-05 2.03596e-05 8.4047e-05
1.5 3.88407e-05 2.13303e-05 8.4047e-05
1.8 3.29027e-05 2.31458e-05 8.4047e-05
2.4 2.49448e-05 2.623e-05 8.4047e-05
3 2.01555e-05 2.832e-05 8.4047e-05
3.6 0 4.68405e-05 8.4047e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000130323 2.7435e-05 8.4047e-05
0.6 7.04223e-05 3.27562e-05 8.4047e-05
0.75 5.49589e-05 3.93818e-05 8.4047e-05
0.9 4.83178e-05 4.11065e-05 8.4047e-05
1.05 4.12148e-05 4.33268e-05 8.4047e-05
1.2 3.03307e-05 5.11997e-05 8.4047e-05
1.35 2.59923e-05 5.32006e-05 8.4047e-05
1.5 2.2525e-05 5.4826e-05 8.4047e-05
1.8 1.75039e-05 5.72524e-05 8.4047e-05
2.4 1.2014e-05 6.00704e-05 8.4047e-05
3 9.63567e-06 6.14787e-05 8.4047e-05
3.6 0 7.15441e-05 8.4047e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000135394 1.99172e-05 8.4047e-05
0.6 7.39111e-05 2.64392e-05 8.4047e-05
0.75 6.12317e-05 2.88519e-05 8.4047e-05
0.9 5.4377e-05 2.97303e-05 8.4047e-05
1.05 4.71828e-05 3.13796e-05 8.4047e-05
1.2 3.38324e-05 4.13796e-05 8.4047e-05
1.35 2.91927e-05 4.35272e-05 8.4047e-05
1.5 2.41842e-05 4.66622e-05 8.4047e-05
1.8 1.84051e-05 4.9899e-05 8.4047e-05
2.4 1.12487e-05 5.44266e-05 8.4047e-05
3 7.63229e-06 5.67835e-05 8.4047e-05
3.6 0 6.38373e-05 8.4047e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.72749e-05 8.4047e-05
0.3 0 3.51949e-05 8.4047e-05
0.6 0 3.04805e-05 8.4047e-05
0.75 0 2.825e-05 8.4047e-05
0.9 0 2.61827e-05 8.4047e-05
1.05 0 2.43165e-05 8.4047e-05
1.2 0 2.26714e-05 8.4047e-05
1.35 0 2.12505e-05 8.4047e-05
1.5 0 2.00436e-05 8.4047e-05
1.8 0 1.81939e-05 8.4047e-05
2.4 0 1.60884e-05 8.4047e-05
3 0 1.50833e-05 8.4047e-05
3.6 0 1.44881e-05 8.4047e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000130415 2.48133e-05 8.4047e-05
0.6 7.05944e-05 2.94872e-05 8.4047e-05
0.75 5.80652e-05 3.17832e-05 8.4047e-05
0.9 5.10577e-05 3.27111e-05 8.4047e-05
1.05 4.50728e-05 3.3816e-05 8.4047e-05
1.2 3.3103e-05 4.25359e-05 8.4047e-05
1.35 2.86203e-05 4.45457e-05 8.4047e-05
1.5 2.37263e-05 4.75243e-05 8.4047e-05
1.8 1.80881e-05 5.04655e-05 8.4047e-05
2.4 1.1084e-05 5.46675e-05 8.4047e-05
3 7.59864e-06 5.70364e-05 8.4047e-05
3.6 0 6.4353e-05 8.4047e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000130619 2.48189e-05 8.4047e-05
0.6 6.96794e-05 3.06705e-05 8.4047e-05
0.75 5.74717e-05 3.28595e-05 8.4047e-05
0.9 5.05803e-05 3.36095e-05 8.4047e-05
1.05 4.45757e-05 3.45797e-05 8.4047e-05
1.2 3.2531e-05 4.32459e-05 8.4047e-05
1.35 2.79494e-05 4.5307e-05 8.4047e-05
1.5 2.29816e-05 4.83948e-05 8.4047e-05
1.8 1.72821e-05 5.16195e-05 8.4047e-05
2.4 1.02488e-05 5.63096e-05 8.4047e-05
3 6.59638e-06 5.89457e-05 8.4047e-05
3.6 0 6.50934e-05 8.4047e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000131118 2.47014e-05 8.4047e-05
0.6 6.94604e-05 3.13388e-05 8.4047e-05
0.75 5.69323e-05 3.38298e-05 8.4047e-05
0.9 4.9774e-05 3.48387e-05 8.4047e-05
1.05 4.36041e-05 3.60161e-05 8.4047e-05
1.2 3.18776e-05 4.44441e-05 8.4047e-05
1.35 2.73375e-05 4.65611e-05 8.4047e-05
1.5 2.24295e-05 4.96856e-05 8.4047e-05
1.8 1.68119e-05 5.30052e-05 8.4047e-05
2.4 9.73429e-06 5.8046e-05 8.4047e-05
3 5.9483e-06 6.1081e-05 8.4047e-05
3.6 0 6.67856e-05 8.4047e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000121594 3.98517e-05 8.4047e-05
0.6 5.85944e-05 5.19191e-05 8.4047e-05
0.75 4.42835e-05 5.86967e-05 8.4047e-05
0.9 3.6782e-05 6.21109e-05 8.4047e-05
1.05 3.02917e-05 6.69761e-05 8.4047e-05
1.2 2.21398e-05 7.30627e-05 8.4047e-05
1.35 1.81325e-05 7.5572e-05 8.4047e-05
1.5 1.50838e-05 7.75133e-05 8.4047e-05
1.8 1.08526e-05 8.04382e-05 8.4047e-05
2.4 6.6501e-06 8.36963e-05 8.4047e-05
3 4.87423e-06 8.54392e-05 8.4047e-05
3.6 0 9.10599e-05 8.4047e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.83563e-05
0 1.73 0 1.83563e-05
0 3.33 0 1.83563e-05
0 4.26 0 1.83563e-05
0 5.06 0 1.83563e-05
0 6.66 0 1.83563e-05
0 7.59 0 1.83563e-05
0 8.39 0 1.83563e-05
0 9.99 0 1.83563e-05
0 13.32 0 1.83563e-05
1.73 1.73 0 1.83563e-05
1.73 3.33 0 1.83563e-05
1.73 4.26 0 1.83563e-05
1.73 5.06 0 1.83563e-05
1.73 6.66 0 1.83563e-05
1.73 7.59 0 1.83563e-05
1.73 8.39 0 1.83563e-05
1.73 9.99 0 1.83563e-05
1.73 13.32 0 1.83563e-05
3.33 3.33 0 1.83563e-05
3.33 4.26 0 1.83563e-05
3.33 5.06 0 1.83563e-05
3.33 6.66 0 1.83563e-05
3.33 7.59 0 1.83563e-05
3.33 8.39 0 1.83563e-05
3.33 9.99 0 1.83563e-05
3.33 13.32 0 1.83563e-05
4.26 4.26 0 1.83563e-05
4.26 5.06 0 1.83563e-05
4.26 6.66 0 1.83563e-05
4.26 7.59 0 1.83563e-05
4.26 8.39 0 1.83563e-05
4.26 9.99 0 1.83563e-05
4.26 13.32 0 1.83563e-05
5.06 5.06 0 1.83563e-05
5.06 6.66 0 1.83563e-05
5.06 7.59 0 1.83563e-05
5.06 8.39 0 1.83563e-05
5.06 9.99 0 1.83563e-05
5.06 13.32 0 1.83563e-05
6.66 6.66 0 1.83563e-05
6.66 7.59 0 1.83563e-05
6.66 8.39 0 1.83563e-05
6.66 9.99 0 1.83563e-05
6.66 13.32 0 1.83563e-05
7.59 7.59 0 1.83563e-05
7.59 8.39 0 1.83563e-05
7.59 9.99 0 1.83563e-05
7.59 13.32 0 1.83563e-05
8.39 8.39 0 1.83563e-05
8.39 9.99 0 1.83563e-05
8.39 13.32 0 1.83563e-05
9.99 9.99 0 1.83563e-05
9.99 13.32 0 1.83563e-05
13.32 0 13.32 1.83563e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 7.70727e-05 1.28051e-05 9.17806e-06
3.2 4.16244e-05 1.8829e-05 9.17806e-06
4 3.48304e-05 2.0061e-05 9.17806e-06
4.8 2.63231e-05 2.44747e-05 9.17806e-06
5.6 2.11476e-05 2.79939e-05 9.17806e-06
6.4 1.8024e-05 2.94438e-05 9.17806e-06
7.2 1.52959e-05 3.08495e-05 9.17806e-06
8 1.31579e-05 3.18988e-05 9.17806e-06
9.6 0 4.2381e-05 9.17806e-06
12.8 0 4.2381e-05 9.17806e-06
16 0 4.2381e-05 9.17806e-06
19.2 0 4.2381e-05 9.17806e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 7.19495e-05 1.88937e-05 9.17806e-06
3.2 3.77517e-05 2.41014e-05 9.17806e-06
4 3.12477e-05 2.54782e-05 9.17806e-06
4.8 2.41341e-05 2.88483e-05 9.17806e-06
5.6 2.0153e-05 3.08419e-05 9.17806e-06
6.4 1.72664e-05 3.20493e-05 9.17806e-06
7.2 1.49348e-05 3.3145e-05 9.17806e-06
8 1.29865e-05 3.41298e-05 9.17806e-06
9.6 0 4.51026e-05 9.17806e-06
12.8 0 4.51026e-05 9.17806e-06
16 0 4.51026e-05 9.17806e-06
19.2 0 4.51026e-05 9.17806e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 7.10698e-05 2.03921e-05 9.17806e-06
3.2 3.71086e-05 2.56048e-05 9.17806e-06
4 3.09144e-05 2.68625e-05 9.17806e-06
4.8 2.38044e-05 3.0346e-05 9.17806e-06
5.6 1.95741e-05 3.26598e-05 9.17806e-06
6.4 1.63623e-05 3.43051e-05 9.17806e-06
7.2 1.36436e-05 3.6008e-05 9.17806e-06
8 1.15478e-05 3.73638e-05 9.17806e-06
9.6 0 4.69941e-05 9.17806e-06
12.8 0 4.69941e-05 9.17806e-06
16 0 4.69941e-05 9.17806e-06
19.2 0 4.69943e-05 9.17806e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 7.02531e-05 2.24514e-05 9.17806e-06
3.2 3.64029e-05 2.78811e-05 9.17806e-06
4 3.02924e-05 2.92348e-05 9.17806e-06
4.8 2.33056e-05 3.29001e-05 9.17806e-06
5.6 1.89839e-05 3.55508e-05 9.17806e-06
6.4 1.56356e-05 3.74956e-05 9.17806e-06
7.2 1.27249e-05 3.94579e-05 9.17806e-06
8 1.04566e-05 4.11284e-05 9.17806e-06
9.6 0 4.95055e-05 9.17806e-06
12.8 0 4.95055e-05 9.17806e-06
16 0 4.95055e-05 9.17806e-06
19.2 0 4.95055e-05 9.17806e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 6.80015e-05 3.08859e-05 9.17806e-06
3.2 3.36584e-05 3.85538e-05 9.17806e-06
4 2.75006e-05 4.04561e-05 9.17806e-06
4.8 2.0938e-05 4.40865e-05 9.17806e-06
5.6 1.71447e-05 4.65752e-05 9.17806e-06
6.4 1.43547e-05 4.82697e-05 9.17806e-06
7.2 1.19269e-05 4.99141e-05 9.17806e-06
8 1.01083e-05 5.09463e-05 9.17806e-06
9.6 0 5.93995e-05 9.17806e-06
12.8 0 5.93995e-05 9.17806e-06
16 0 5.93995e-05 9.17806e-06
19.2 0 5.93995e-05 9.17806e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 4.59423e-05 8.66424e-05 9.17806e-06
3.2 1.95217e-05 9.2759e-05 9.17806e-06
4 1.68641e-05 9.08466e-05 9.17806e-06
4.8 1.25324e-05 9.34708e-05 9.17806e-06
5.6 1.03412e-05 9.52085e-05 9.17806e-06
6.4 8.94776e-06 9.61762e-05 9.17806e-06
7.2 7.93763e-06 9.69672e-05 9.17806e-06
8 8.77156e-06 9.43731e-05 9.17806e-06
9.6 0 0.000104426 9.17806e-06
12.8 0 0.000104418 9.17806e-06
16 0 0.000104412 9.17806e-06
19.2 0 0.000104445 9.17806e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0

DensityModel 1

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0681705
0 0.31 0 0.0681705
0 0.48 0 0.0681705
0 0.705 0 0.0681705
0 0.79 0 0.0681705
0 0.96 0 0.0681705
0 1.185 0 0.0681705
0 1.27 0 0.0681705
0 1.44 0 0.0681705
0 1.92 0 0.0681705
0.31 0.31 0 0.0681705
0.31 0.48 0 0.0681705
0.31 0.705 0 0.0681705
0.31 0.79 0 0.0681705
0.31 0.96 0 0.0681705
0.31 1.185 0 0.0681705
0.31 1.27 0 0.0681705
0.31 1.44 0 0.0681705
0.31 1.92 0 0.0681705
0.48 0.48 0 0.0681705
0.48 0.705 0 0.0681705
0.48 0.79 0 0.0681705
0.48 0.96 0 0.0681705
0.48 1.185 0 0.0681705
0.48 1.27 0 0.0681705
0.48 1.44 0 0.0681705
0.48 1.92 0 0.0681705
0.705 0.705 0 0.0681705
0.705 0.79 0 0.0681705
0.705 0.96 0 0.0681705
0.705 1.185 0 0.0681705
0.705 1.27 0 0.0681705
0.705 1.44 0 0.0681705
0.705 1.92 0 0.0681705
0.79 0.79 0 0.0681705
0.79 0.96 0 0.0681705
0.79 1.185 0 0.0681705
0.79 1.27 0 0.0681705
0.79 1.44 0 0.0681705
0.79 1.92 0 0.0681705
0.96 0.96 0 0.0681705
0.96 1.185 0 0.0681705
0.96 1.27 0 0.0681705
0.96 1.44 0 0.0681705
0.96 1.92 0 0.0681705
1.185 1.185 0 0.0681705
1.185 1.27 0 0.0681705
1.185 1.44 0 0.0681705
1.185 1.92 0 0.0681705
1.27 1.27 0 0.0681705
1.27 1.44 0 0.0681705
1.27 1.92 0 0.0681705
1.44 1.44 0 0.0681705
1.44 1.92 0 0.0681705
1.92 0 1.92 0.0681705
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 8.61372e-05 9.44952e-06 0.0340853
0.34 5.12844e-05 1.33801e-05 0.0340853
0.425 4.3541e-05 1.4824e-05 0.0340853
0.51 3.88428e-05 1.54397e-05 0.0340853
0.595 3.34495e-05 1.78955e-05 0.0340853
0.68 3.09507e-05 1.8301e-05 0.0340853
0.765 2.52695e-05 2.19586e-05 0.0340853
0.85 2.37271e-05 2.22492e-05 0.0340853
1.02 2.19149e-05 2.261e-05 0.0340853
1.36 1.91487e-05 2.24345e-05 0.0340853
1.7 0 3.91595e-05 0.0340853
2.04 0 3.91595e-05 0.0340853
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 6.80777e-05 3.34433e-05 0.0340853
0.34 3.61876e-05 3.33933e-05 0.0340853
0.425 3.23648e-05 3.24802e-05 0.0340853
0.51 2.79091e-05 3.41271e-05 0.0340853
0.595 2.3655e-05 3.64674e-05 0.0340853
0.68 1.98402e-05 3.89822e-05 0.0340853
0.765 1.61768e-05 4.11339e-05 0.0340853
0.85 1.35702e-05 4.31009e-05 0.0340853
1.02 9.32626e-06 4.69828e-05 0.0340853
1.36 1.29978e-05 4.73246e-05 0.0340853
1.7 0 5.96826e-05 0.0340853
2.04 0 5.96818e-05 0.0340853
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 7.93746e-05 1.67654e-05 0.0340853
0.34 4.55879e-05 1.9837e-05 0.0340853
0.425 3.80076e-05 2.15216e-05 0.0340853
0.51 3.33286e-05 2.23055e-05 0.0340853
0.595 2.90274e-05 2.37905e-05 0.0340853
0.68 2.61838e-05 2.46021e-05 0.0340853
0.765 2.17494e-05 2.71055e-05 0.0340853
0.85 1.97574e-05 2.80056e-05 0.0340853
1.02 1.68608e-05 2.99991e-05 0.0340853
1.36 1.18524e-05 3.36875e-05 0.0340853
1.7 0 4.32588e-05 0.0340853
2.04 0 4.32588e-05 0.0340853
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 8.1339e-05 1.43746e-05 0.0340853
0.34 4.83253e-05 1.64574e-05 0.0340853
0.425 4.06995e-05 1.81761e-05 0.0340853
0.51 3.59956e-05 1.90192e-05 0.0340853
0.595 3.09877e-05 2.11822e-05 0.0340853
0.68 2.81327e-05 2.18956e-05 0.0340853
0.765 2.30317e-05 2.48824e-05 0.0340853
0.85 2.11752e-05 2.54048e-05 0.0340853
1.02 1.88539e-05 2.62139e-05 0.0340853
1.36 1.58653e-05 2.65591e-05 0.0340853
1.7 0 4.12234e-05 0.0340853
2.04 0 4.12234e-05 0.0340853
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 8.24722e-05 1.31413e-05 0.0340853
0.34 4.90302e-05 1.57381e-05 0.0340853
0.425 4.16521e-05 1.71229e-05 0.0340853
0.51 3.71326e-05 1.76188e-05 0.0340853
0.595 3.23129e-05 1.94861e-05 0.0340853
0.68 2.95651e-05 2.00547e-05 0.0340853
0.765 2.44851e-05 2.3032e-05 0.0340853
0.85 2.26448e-05 2.35791e-05 0.0340853
1.02 2.0326e-05 2.45073e-05 0.0340853
1.36 1.72821e-05 2.52146e-05 0.0340853
1.7 0 4.02602e-05 0.0340853
2.04 0 4.02602e-05 0.0340853
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 8.19265e-05 1.35744e-05 0.0340853
0.34 4.90529e-05 1.5458e-05 0.0340853
0.425 4.1736e-05 1.67972e-05 0.0340853
0.51 3.7272e-05 1.72522e-05 0.0340853
0.595 3.24866e-05 1.90445e-05 0.0340853
0.68 2.97193e-05 1.95578e-05 0.0340853
0.765 2.46764e-05 2.24312e-05 0.0340853
0.85 2.28305e-05 2.29498e-05 0.0340853
1.02 2.0544e-05 2.39104e-05 0.0340853
1.36 1.7595e-05 2.51078e-05 0.0340853
1.7 0 3.97983e-05 0.0340853
2.04 0 3.97982e-05 0.0340853
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 2.66887e-05 0.0340853
0.17 0 2.24007e-05 0.0340853
0.34 0 1.9211e-05 0.0340853
0.425 0 1.79128e-05 0.0340853
0.51 0 1.68696e-05 0.0340853
0.595 0 1.60676e-05 0.0340853
0.68 0 1.54732e-05 0.0340853
0.765 0 1.50473e-05 0.0340853
0.85 0 1.47528e-05 0.0340853
1.02 0 1.44392e-05 0.0340853
1.36 0 1.43783e-05 0.0340853
1.7 0 9.51316e-06 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 1.30121e-05 0.0340853
0.17 0 1.24717e-05 0.0340853
0.34 0 1.19979e-05 0.0340853
0.425 0 1.17403e-05 0.0340853
0.51 0 1.14754e-05 0.0340853
0.595 0 1.12057e-05 0.0340853
0.68 0 1.09324e-05 0.0340853
0.765 0 1.06556e-05 0.0340853
0.85 0 1.03755e-05 0.0340853
1.02 0 9.80591e-06 0.0340853
1.36 0 1.0251e-05 0.0340853
1.7 0 9.16462e-06 0.0340853
2.04 0 8.19109e-06 0.0340853
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 9.24997e-06 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 6.03723e-06 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00120566
0 0.23 0 0.00120566
0 0.37 0 0.00120566
0 0.53 0 0.00120566
0 0.6 0 0.00120566
0 0.74 0 0.00120566
0 0.9 0 0.00120566
0 0.97 0 0.00120566
0 1.11 0 0.00120566
0 1.48 0 0.00120566
0.23 0.23 0 0.00120566
0.23 0.37 0 0.00120566
0.23 0.53 0 0.00120566
0.23 0.6 0 0.00120566
0.23 0.74 0 0.00120566
0.23 0.9 0 0.00120566
0.23 0.97 0 0.00120566
0.23 1.11 0 0.00120566
0.23 1.48 0 0.00120566
0.37 0.37 0 0.00120566
0.37 0.53 0 0.00120566
0.37 0.6 0 0.00120566
0.37 0.74 0 0.00120566
0.37 0.9 0 0.00120566
0.37 0.97 0 0.00120566
0.37 1.11 0 0.00120566
0.37 1.48 0 0.00120566
0.53 0.53 0 0.00120566
0.53 0.6 0 0.00120566
0.53 0.74 0 0.00120566
0.53 0.9 0 0.00120566
0.53 0.97 0 0.00120566
0.53 1.11 0 0.00120566
0.53 1.48 0 0.00120566
0.6 0.6 0 0.00120566
0.6 0.74 0 0.00120566
0.6 0.9 0 0.00120566
0.6 0.97 0 0.00120566
0.6 1.11 0 0.00120566
0.6 1.48 0 0.00120566
0.74 0.74 0 0.00120566
0.74 0.9 0 0.00120566
0.74 0.97 0 0.00120566
0.74 1.11 0 0.00120566
0.74 1.48 0 0.00120566
0.9 0.9 0 0.00120566
0.9 0.97 0 0.00120566
0.9 1.11 0 0.00120566
0.9 1.48 0 0.00120566
0.97 0.97 0 0.00120566
0.97 1.11 0 0.00120566
0.97 1.48 0 0.00120566
1.11 1.11 0 0.00120566
1.11 1.48 0 0.00120566
1.48 0 1.48 0.00120566
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000138118 5.73561e-06 0.000602828
0.28 8.52281e-05 7.80545e-06 0.000602828
0.35 7.30176e-05 8.35076e-06 0.000602828
0.42 6.58219e-05 8.11883e-06 0.000602828
0.49 5.71535e-05 1.02824e-05 0.000602828
0.56 5.08842e-05 1.18282e-05 0.000602828
0.63 4.11549e-05 1.83851e-05 0.000602828
0.7 3.76403e-05 1.93881e-05 0.000602828
0.84 3.18492e-05 2.13832e-05 0.000602828
1.12 2.39134e-05 2.43226e-05 0.000602828
1.4 1.83959e-05 2.6658e-05 0.000602828
1.68 0 4.29842e-05 0.000602828
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000130654 1.567e-05 0.000602828
0.28 7.42447e-05 2.18678e-05 0.000602828
0.35 6.24752e-05 2.35482e-05 0.000602828
0.42 5.54264e-05 2.41468e-05 0.000602828
0.49 4.83787e-05 2.59601e-05 0.000602828
0.56 4.21914e-05 2.84295e-05 0.000602828
0.63 3.48531e-05 3.32113e-05 0.000602828
0.7 3.12986e-05 3.48401e-05 0.000602828
0.84 2.36804e-05 3.98139e-05 0.000602828
1.12 1.6881e-05 4.38251e-05 0.000602828
1.4 1.26539e-05 4.67742e-05 0.000602828
1.68 0 5.8778e-05 0.000602828
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000125315 2.16179e-05 0.000602828
0.28 6.95395e-05 2.85793e-05 0.000602828
0.35 5.66731e-05 3.2483e-05 0.000602828
0.42 4.79433e-05 3.60836e-05 0.000602828
0.49 4.07063e-05 3.92515e-05 0.000602828
0.56 3.44506e-05 4.25667e-05 0.000602828
0.63 2.73011e-05 4.77156e-05 0.000602828
0.7 2.39016e-05 4.955e-05 0.000602828
0.84 1.85187e-05 5.2665e-05 0.000602828
1.12 9.52476e-06 5.89915e-05 0.000602828
1.4 7.1476e-06 6.0619e-05 0.000602828
1.68 0 6.7952e-05 0.000602828
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000130705 1.50119e-05 0.000602828
0.28 7.79806e-05 1.64308e-05 0.000602828
0.35 6.60048e-05 1.74046e-05 0.000602828
0.42 5.88336e-05 1.74203e-05 0.000602828
0.49 5.20059e-05 1.8409e-05 0.000602828
0.56 4.54686e-05 2.03003e-05 0.000602828
0.63 3.79594e-05 2.46138e-05 0.000602828
0.7 3.42363e-05 2.57893e-05 0.000602828
0.84 2.82732e-05 2.79929e-05 0.000602828
1.12 2.04041e-05 3.13738e-05 0.000602828
1.4 1.49853e-05 3.43422e-05 0.000602828
1.68 0 4.79875e-05 0.000602828
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000132208 1.2287e-05 0.000602828
0.28 8.20972e-05 1.12027e-05 0.000602828
0.35 6.98093e-05 1.22795e-05 0.000602828
0.42 6.24113e-05 1.21279e-05 0.000602828
0.49 5.46395e-05 1.37539e-05 0.000602828
0.56 4.82341e-05 1.53582e-05 0.000602828
0.63 3.98791e-05 2.04812e-05 0.000602828
0.7 3.64359e-05 2.14036e-05 0.000602828
0.84 3.09173e-05 2.32351e-05 0.000602828
1.12 2.32619e-05 2.6199e-05 0.000602828
1.4 1.74854e-05 2.89191e-05 0.000602828
1.68 0 4.43916e-05 0.000602828
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000129054 1.46584e-05 0.000602828
0.28 7.94672e-05 1.26295e-05 0.000602828
0.35 6.82334e-05 1.28446e-05 0.000602828
0.42 6.16935e-05 1.22491e-05 0.000602828
0.49 5.4609e-05 1.35439e-05 0.000602828
0.56 4.85906e-05 1.49208e-05 0.000602828
0.63 4.0474e-05 1.9796e-05 0.000602828
0.7 3.71105e-05 2.05385e-05 0.000602828
0.84 3.16873e-05 2.20032e-05 0.000602828
1.12 2.4533e-05 2.42645e-05 0.000602828
1.4 1.95902e-05 2.6429e-05 0.000602828
1.68 0 4.43317e-05 0.000602828
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 3.31347e-05 0.000602828
0.14 0 2.73289e-05 0.000602828
0.28 0 2.33157e-05 0.000602828
0.35 0 2.14946e-05 0.000602828
0.42 0 1.99143e-05 0.000602828
0.49 0 1.8593e-05 0.000602828
0.56 0 1.71886e-05 0.000602828
0.63 0 1.63751e-05 0.000602828
0.7 0 1.57544e-05 0.000602828
0.84 0 1.49643e-05 0.000602828
1.12 0 1.45003e-05 0.000602828
1.4 0 1.4692e-05 0.000602828
1.68 0 1.49947e-05 0.000602828
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.71233e-05 0.000602828
0.14 0 1.6158e-05 0.000602828
0.28 0 1.57688e-05 0.000602828
0.35 0 1.55375e-05 0.000602828
0.42 0 1.52888e-05 0.000602828
0.49 0 1.50272e-05 0.000602828
0.56 0 1.44808e-05 0.000602828
0.63 0 1.4219e-05 0.000602828
0.7 0 1.39606e-05 0.000602828
0.84 0 1.34715e-05 0.000602828
1.12 0 1.26613e-05 0.000602828
1.4 0 1.20702e-05 0.000602828
1.68 0 1.16482e-05 0.000602828
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 9.81043e-06 0.000602828
0.14 0 9.44235e-06 0.000602828
0.28 0 9.37367e-06 0.000602828
0.35 0 9.33254e-06 0.000602828
0.42 0 9.28864e-06 0.000602828
0.49 0 9.24217e-06 0.000602828
0.56 0 9.02038e-06 0.000602828
0.63 0 8.97284e-06 0.000602828
0.7 0 8.92341e-06 0.000602828
0.84 0 8.81955e-06 0.000602828
1.12 0 8.59823e-06 0.000602828
1.4 0 8.37071e-06 0.000602828
1.68 0 0 0.000602828
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 8.57973e-06 0.000602828
0.14 0 0 0.000602828
0.28 0 0 0.000602828
0.35 0 0 0.000602828
0.42 0 0 0.000602828
0.49 0 0 0.000602828
0.56 0 0 0.000602828
0.63 0 0 0.000602828
0.7 0 0 0.000602828
0.84 0 0 0.000602828
1.12 0 0 0.000602828
1.4 0 0 0.000602828
1.68 0 0 0.000602828
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000119372 3.57253e-05 0.000602828
0.28 6.27954e-05 4.44719e-05 0.000602828
0.35 4.88178e-05 5.08946e-05 0.000602828
0.42 3.95403e-05 5.63268e-05 0.000602828
0.49 3.34018e-05 6.23328e-05 0.000602828
0.56 2.73394e-05 6.6527e-05 0.000602828
0.63 2.16318e-05 7.10757e-05 0.000602828
0.7 1.83906e-05 7.35041e-05 0.000602828
0.84 1.35103e-05 7.73619e-05 0.000602828
1.12 8.4057e-06 8.16741e-05 0.000602828
1.4 6.46386e-06 8.30622e-05 0.000602828
1.68 0 8.8504e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000124988 2.29842e-05 0.000602828
0.28 6.90886e-05 2.85542e-05 0.000602828
0.35 5.76192e-05 3.0258e-05 0.000602828
0.42 5.06751e-05 3.09869e-05 0.000602828
0.49 4.45953e-05 3.23341e-05 0.000602828
0.56 3.82076e-05 3.51534e-05 0.000602828
0.63 3.19793e-05 3.88739e-05 0.000602828
0.7 2.82205e-05 4.07125e-05 0.000602828
0.84 2.02291e-05 4.60782e-05 0.000602828
1.12 1.35021e-05 5.02313e-05 0.000602828
1.4 9.5176e-06 5.33196e-05 0.000602828
1.68 0 6.26264e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000126034 2.05039e-05 0.000602828
0.28 7.19999e-05 2.42552e-05 0.000602828
0.35 6.00408e-05 2.63318e-05 0.000602828
0.42 5.27087e-05 2.71038e-05 0.000602828
0.49 4.60601e-05 2.87162e-05 0.000602828
0.56 3.97624e-05 3.12743e-05 0.000602828
0.63 3.32514e-05 3.52182e-05 0.000602828
0.7 2.9778e-05 3.67814e-05 0.000602828
0.84 2.22918e-05 4.17105e-05 0.000602828
1.12 1.59869e-05 4.53682e-05 0.000602828
1.4 1.17684e-05 4.82969e-05 0.000602828
1.68 0 5.93339e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000124315 2.20393e-05 0.000602828
0.28 7.07847e-05 2.48307e-05 0.000602828
0.35 5.91661e-05 2.66924e-05 0.000602828
0.42 5.21487e-05 2.73862e-05 0.000602828
0.49 4.57906e-05 2.8894e-05 0.000602828
0.56 3.97363e-05 3.12372e-05 0.000602828
0.63 3.33777e-05 3.49493e-05 0.000602828
0.7 3.0004e-05 3.62833e-05 0.000602828
0.84 2.26829e-05 4.077e-05 0.000602828
1.12 1.67524e-05 4.38231e-05 0.000602828
1.4 1.29366e-05 4.64806e-05 0.000602828
1.68 0 5.88991e-05 0.000602828
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00122133
0 0.34 0 0.00122133
0 0.48 0 0.00122133
0 0.75 0 0.00122133
0 0.82 0 0.00122133
0 0.96 0 0.00122133
0 1.23 0 0.00122133
0 1.3 0 0.00122133
0 1.44 0 0.00122133
0 1.92 0 0.00122133
0.34 0.34 0 0.00122133
0.34 0.48 0 0.00122133
0.34 0.75 0 0.00122133
0.34 0.82 0 0.00122133
0.34 0.96 0 0.00122133
0.34 1.23 0 0.00122133
0.34 1.3 0 0.00122133
0.34 1.44 0 0.00122133
0.34 1.92 0 0.00122133
0.48 0.48 0 0.00122133
0.48 0.75 0 0.00122133
0.48 0.82 0 0.00122133
0.48 0.96 0 0.00122133
0.48 1.23 0 0.00122133
0.48 1.3 0 0.00122133
0.48 1.44 0 0.00122133
0.48 1.92 0 0.00122133
0.75 0.75 0 0.00122133
0.75 0.82 0 0.00122133
0.75 0.96 0 0.00122133
0.75 1.23 0 0.00122133
0.75 1.3 0 0.00122133
0.75 1.44 0 0.00122133
0.75 1.92 0 0.00122133
0.82 0.82 0 0.00122133
0.82 0.96 0 0.00122133
0.82 1.23 0 0.00122133
0.82 1.3 0 0.00122133
0.82 1.44 0 0.00122133
0.82 1.92 0 0.00122133
0.96 0.96 0 0.00122133
0.96 1.23 0 0.00122133
0.96 1.3 0 0.00122133
0.96 1.44 0 0.00122133
0.96 1.92 0 0.00122133
1.23 1.23 0 0.00122133
1.23 1.3 0 0.00122133
1.23 1.44 0 0.00122133
1.23 1.92 0 0.00122133
1.3 1.3 0 0.00122133
1.3 1.44 0 0.00122133
1.3 1.92 0 0.00122133
1.44 1.44 0 0.00122133
1.44 1.92 0 0.00122133
1.92 0 1.92 0.00122133
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000136816 6.4904e-06 0.000610664
0.28 8.34141e-05 9.07691e-06 0.000610664
0.35 7.14996e-05 9.78972e-06 0.000610664
0.42 6.58888e-05 8.30119e-06 0.000610664
0.49 5.83556e-05 9.50429e-06 0.000610664
0.56 4.70158e-05 1.65661e-05 0.000610664
0.63 4.32143e-05 1.7029e-05 0.000610664
0.7 4.01096e-05 1.74903e-05 0.000610664
0.84 3.52495e-05 1.84518e-05 0.000610664
1.12 2.83e-05 2.04259e-05 0.000610664
1.4 2.35213e-05 2.18521e-05 0.000610664
1.68 0 4.29564e-05 0.000610664
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000127192 1.69995e-05 0.000610664
0.28 7.66247e-05 1.63418e-05 0.000610664
0.35 6.50566e-05 1.70294e-05 0.000610664
0.42 5.90549e-05 1.62173e-05 0.000610664
0.49 5.32273e-05 1.65602e-05 0.000610664
0.56 4.46891e-05 2.114e-05 0.000610664
0.63 4.07293e-05 2.19278e-05 0.000610664
0.7 3.74585e-05 2.26078e-05 0.000610664
0.84 3.23579e-05 2.37641e-05 0.000610664
1.12 2.54578e-05 2.5716e-05 0.000610664
1.4 2.10804e-05 2.71969e-05 0.000610664
1.68 0 4.64982e-05 0.000610664
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000124423 2.32963e-05 0.000610664
0.28 6.96191e-05 2.85508e-05 0.000610664
0.35 5.56138e-05 3.34378e-05 0.000610664
0.42 4.92953e-05 3.40191e-05 0.000610664
0.49 4.27985e-05 3.56844e-05 0.000610664
0.56 3.40381e-05 4.10225e-05 0.000610664
0.63 2.98499e-05 4.25768e-05 0.000610664
0.7 2.64613e-05 4.39629e-05 0.000610664
0.84 2.01626e-05 4.76138e-05 0.000610664
1.12 1.40572e-05 5.12535e-05 0.000610664
1.4 1.08465e-05 5.32306e-05 0.000610664
1.68 0 6.30477e-05 0.000610664
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000126123 1.95052e-05 0.000610664
0.28 7.26959e-05 2.23848e-05 0.000610664
0.35 5.95301e-05 2.56742e-05 0.000610664
0.42 5.08436e-05 2.8336e-05 0.000610664
0.49 4.43139e-05 3.00085e-05 0.000610664
0.56 3.54721e-05 3.54467e-05 0.000610664
0.63 3.14061e-05 3.68564e-05 0.000610664
0.7 2.81522e-05 3.8015e-05 0.000610664
0.84 2.33034e-05 3.98469e-05 0.000610664
1.12 1.70668e-05 4.26181e-05 0.000610664
1.4 1.30512e-05 4.46023e-05 0.000610664
1.68 0 5.62342e-05 0.000610664
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000128808 1.51914e-05 0.000610664
0.28 7.72605e-05 1.52063e-05 0.000610664
0.35 6.57281e-05 1.59295e-05 0.000610664
0.42 5.97961e-05 1.5065e-05 0.000610664
0.49 5.40428e-05 1.52938e-05 0.000610664
0.56 4.55078e-05 1.98013e-05 0.000610664
0.63 4.15542e-05 2.05024e-05 0.000610664
0.7 3.82674e-05 2.11168e-05 0.000610664
0.84 3.30494e-05 2.22271e-05 0.000610664
1.12 2.56053e-05 2.43909e-05 0.000610664
1.4 2.05985e-05 2.61987e-05 0.000610664
1.68 0 4.48263e-05 0.000610664
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000131355 1.24995e-05 0.000610664
0.28 8.05674e-05 1.16327e-05 0.000610664
0.35 6.90668e-05 1.23992e-05 0.000610664
0.42 6.29339e-05 1.15131e-05 0.000610664
0.49 5.61372e-05 1.25383e-05 0.000610664
0.56 4.63299e-05 1.80852e-05 0.000610664
0.63 4.22832e-05 1.87244e-05 0.000610664
0.7 3.8944e-05 1.93101e-05 0.000610664
0.84 3.37351e-05 2.04174e-05 0.000610664
1.12 2.65995e-05 2.25418e-05 0.000610664
1.4 2.1936e-05 2.41638e-05 0.000610664
1.68 0 4.40076e-05 0.000610664
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.89764e-05 0.000610664
0.14 0 2.70012e-05 0.000610664
0.28 0 2.51016e-05 0.000610664
0.35 0 2.40922e-05 0.000610664
0.42 0 2.30957e-05 0.000610664
0.49 0 2.21433e-05 0.000610664
0.56 0 2.12575e-05 0.000610664
0.63 0 2.04523e-05 0.000610664
0.7 0 1.97342e-05 0.000610664
0.84 0 1.85571e-05 0.000610664
1.12 0 1.70525e-05 0.000610664
1.4 0 1.62383e-05 0.000610664
1.68 0 1.57202e-05 0.000610664
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.23209e-05 0.000610664
0.14 0 1.19729e-05 0.000610664
0.28 0 1.18364e-05 0.000610664
0.35 0 1.1765e-05 0.000610664
0.42 0 1.1692e-05 0.000610664
0.49 0 1.16174e-05 0.000610664
0.56 0 1.15415e-05 0.000610664
0.63 0 1.14645e-05 0.000610664
0.7 0 1.13866e-05 0.000610664
0.84 0 1.12286e-05 0.000610664
1.12 0 1.09062e-05 0.000610664
1.4 0 1.05776e-05 0.000610664
1.68 0 1.02431e-05 0.000610664
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.0436e-05 0.000610664
0.14 0 1.03181e-05 0.000610664
0.28 0 1.02827e-05 0.000610664
0.35 0 1.02641e-05 0.000610664
0.42 0 1.0245e-05 0.000610664
0.49 0 1.02253e-05 0.000610664
0.56 0 1.0205e-05 0.000610664
0.63 0 1.01841e-05 0.000610664
0.7 0 1.01626e-05 0.000610664
0.84 0 1.01175e-05 0.000610664
1.12 0 1.00172e-05 0.000610664
1.4 0 9.8733e-06 0.000610664
1.68 0 9.58175e-06 0.000610664
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000121272 2.58426e-05 0.000610664
0.28 6.86112e-05 2.78188e-05 0.000610664
0.35 5.54947e-05 3.12117e-05 0.000610664
0.42 4.65322e-05 3.42706e-05 0.000610664
0.49 4.08755e-05 3.55205e-05 0.000610664
0.56 3.35405e-05 3.96486e-05 0.000610664
0.63 2.94009e-05 4.12735e-05 0.000610664
0.7 2.60535e-05 4.26151e-05 0.000610664
0.84 2.10025e-05 4.47461e-05 0.000610664
1.12 1.4424e-05 4.80529e-05 0.000610664
1.4 1.03605e-05 5.03658e-05 0.000610664
1.68 0 5.95973e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000123453 2.16163e-05 0.000610664
0.28 7.35216e-05 1.98995e-05 0.000610664
0.35 6.18244e-05 2.10267e-05 0.000610664
0.42 5.53367e-05 2.0826e-05 0.000610664
0.49 5.02035e-05 2.08249e-05 0.000610664
0.56 4.30336e-05 2.41143e-05 0.000610664
0.63 3.89508e-05 2.5055e-05 0.000610664
0.7 3.55934e-05 2.58272e-05 0.000610664
0.84 3.04001e-05 2.70796e-05 0.000610664
1.12 2.34671e-05 2.92113e-05 0.000610664
1.4 1.90797e-05 3.10369e-05 0.000610664
1.68 0 4.87429e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000124949 1.96143e-05 0.000610664
0.28 7.52264e-05 1.76242e-05 0.000610664
0.35 6.37136e-05 1.85306e-05 0.000610664
0.42 5.72626e-05 1.81979e-05 0.000610664
0.49 5.17016e-05 1.85489e-05 0.000610664
0.56 4.39077e-05 2.23637e-05 0.000610664
0.63 3.9734e-05 2.33058e-05 0.000610664
0.7 3.62877e-05 2.4091e-05 0.000610664
0.84 3.09712e-05 2.53663e-05 0.000610664
1.12 2.40379e-05 2.745e-05 0.000610664
1.4 1.97744e-05 2.91518e-05 0.000610664
1.68 0 4.74739e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000115608 3.50312e-05 0.000610664
0.28 5.83119e-05 4.55418e-05 0.000610664
0.35 4.49743e-05 5.09966e-05 0.000610664
0.42 3.77431e-05 5.36392e-05 0.000610664
0.49 3.17863e-05 5.8277e-05 0.000610664
0.56 2.4851e-05 6.28011e-05 0.000610664
0.63 2.09385e-05 6.49097e-05 0.000610664
0.7 1.79023e-05 6.66157e-05 0.000610664
0.84 1.3077e-05 6.97887e-05 0.000610664
1.12 8.49625e-06 7.31327e-05 0.000610664
1.4 6.21704e-06 7.4809e-05 0.000610664
1.68 0 8.01802e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000119812 2.94677e-05 0.000610664
0.28 6.54912e-05 3.40758e-05 0.000610664
0.35 5.13057e-05 3.94727e-05 0.000610664
0.42 4.45564e-05 4.07913e-05 0.000610664
0.49 3.88127e-05 4.2283e-05 0.000610664
0.56 3.15132e-05 4.63845e-05 0.000610664
0.63 2.72338e-05 4.81364e-05 0.000610664
0.7 2.37708e-05 4.96133e-05 0.000610664
0.84 1.73816e-05 5.3278e-05 0.000610664
1.12 1.12978e-05 5.68197e-05 0.000610664
1.4 8.22247e-06 5.88459e-05 0.000610664
1.68 0 6.6398e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000121356 2.66641e-05 0.000610664
0.28 6.77499e-05 3.03143e-05 0.000610664
0.35 5.37608e-05 3.54326e-05 0.000610664
0.42 4.70926e-05 3.64729e-05 0.000610664
0.49 4.08946e-05 3.81779e-05 0.000610664
0.56 3.29078e-05 4.27905e-05 0.000610664
0.63 2.85927e-05 4.44477e-05 0.000610664
0.7 2.51025e-05 4.58613e-05 0.000610664
0.84 1.86949e-05 4.94652e-05 0.000610664
1.12 1.26703e-05 5.29469e-05 0.000610664
1.4 9.66659e-06 5.48745e-05 0.000610664
1.68 0 6.37319e-05 0.000610664
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000166283
0 0.44 0 0.000166283
0 0.74 0 0.000166283
0 1.03 0 0.000166283
0 1.18 0 0.000166283
0 1.48 0 0.000166283
0 1.77 0 0.000166283
0 1.92 0 0.000166283
0 2.22 0 0.000166283
0 2.96 0 0.000166283
0.44 0.44 0 0.000166283
0.44 0.74 0 0.000166283
0.44 1.03 0 0.000166283
0.44 1.18 0 0.000166283
0.44 1.48 0 0.000166283
0.44 1.77 0 0.000166283
0.44 1.92 0 0.000166283
0.44 2.22 0 0.000166283
0.44 2.96 0 0.000166283
0.74 0.74 0 0.000166283
0.74 1.03 0 0.000166283
0.74 1.18 0 0.000166283
0.74 1.48 0 0.000166283
0.74 1.77 0 0.000166283
0.74 1.92 0 0.000166283
0.74 2.22 0 0.000166283
0.74 2.96 0 0.000166283
1.03 1.03 0 0.000166283
1.03 1.18 0 0.000166283
1.03 1.48 0 0.000166283
1.03 1.77 0 0.000166283
1.03 1.92 0 0.000166283
1.03 2.22 0 0.000166283
1.03 2.96 0 0.000166283
1.18 1.18 0 0.000166283
1.18 1.48 0 0.000166283
1.18 1.77 0 0.000166283
1.18 1.92 0 0.000166283
1.18 2.22 0 0.000166283
1.18 2.96 0 0.000166283
1.48 1.48 0 0.000166283
1.48 1.77 0 0.000166283
1.48 1.92 0 0.000166283
1.48 2.22 0 0.000166283
1.48 2.96 0 0.000166283
1.77 1.77 0 0.000166283
1.77 1.92 0 0.000166283
1.77 2.22 0 0.000166283
1.77 2.96 0 0.000166283
1.92 1.92 0 0.000166283
1.92 2.22 0 0.000166283
1.92 2.96 0 0.000166283
2.22 2.22 0 0.000166283
2.22 2.96 0 0.000166283
2.96 0 2.96 0.000166283
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00014806 6.0032e-06 8.31416e-05
0.6 8.72099e-05 8.08133e-06 8.31416e-05
0.75 7.37384e-05 9.38141e-06 8.31416e-05
0.9 6.50704e-05 1.01538e-05 8.31416e-05
1.05 5.63535e-05 1.19692e-05 8.31416e-05
1.2 4.99443e-05 1.33485e-05 8.31416e-05
1.35 4.57542e-05 1.41569e-05 8.31416e-05
1.5 3.71365e-05 2.01545e-05 8.31416e-05
1.8 3.21699e-05 2.13106e-05 8.31416e-05
2.4 2.52504e-05 2.33487e-05 8.31416e-05
3 1.95583e-05 2.58394e-05 8.31416e-05
3.6 0 4.34504e-05 8.31416e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.00014111 1.38723e-05 8.31416e-05
0.6 8.1707e-05 1.43318e-05 8.31416e-05
0.75 6.84653e-05 1.55604e-05 8.31416e-05
0.9 6.02964e-05 1.57031e-05 8.31416e-05
1.05 5.3374e-05 1.62431e-05 8.31416e-05
1.2 4.68504e-05 1.79145e-05 8.31416e-05
1.35 4.25354e-05 1.89832e-05 8.31416e-05
1.5 3.61744e-05 2.28577e-05 8.31416e-05
1.8 3.09981e-05 2.44961e-05 8.31416e-05
2.4 2.4072e-05 2.71202e-05 8.31416e-05
3 1.86949e-05 2.98237e-05 8.31416e-05
3.6 0 4.6886e-05 8.31416e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000140269 1.5854e-05 8.31416e-05
0.6 7.95803e-05 1.82502e-05 8.31416e-05
0.75 6.60577e-05 2.0166e-05 8.31416e-05
0.9 5.75943e-05 2.08744e-05 8.31416e-05
1.05 5.04916e-05 2.17562e-05 8.31416e-05
1.2 4.40156e-05 2.35596e-05 8.31416e-05
1.35 3.97364e-05 2.47136e-05 8.31416e-05
1.5 3.3428e-05 2.86658e-05 8.31416e-05
1.8 2.82882e-05 3.05424e-05 8.31416e-05
2.4 2.12886e-05 3.37244e-05 8.31416e-05
3 1.59798e-05 3.67443e-05 8.31416e-05
3.6 0 5.13943e-05 8.31416e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000134986 2.28838e-05 8.31416e-05
0.6 6.96619e-05 3.38989e-05 8.31416e-05
0.75 5.72228e-05 3.7435e-05 8.31416e-05
0.9 4.84984e-05 4.06081e-05 8.31416e-05
1.05 4.09459e-05 4.37168e-05 8.31416e-05
1.2 3.44564e-05 4.69265e-05 8.31416e-05
1.35 3.02674e-05 4.88497e-05 8.31416e-05
1.5 2.42707e-05 5.31037e-05 8.31416e-05
1.8 2.00089e-05 5.48545e-05 8.31416e-05
2.4 1.37294e-05 5.79563e-05 8.31416e-05
3 9.76125e-06 6.05071e-05 8.31416e-05
3.6 0 7.07783e-05 8.31416e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000135316 2.36301e-05 8.31416e-05
0.6 6.7595e-05 3.84026e-05 8.31416e-05
0.75 5.37506e-05 4.24264e-05 8.31416e-05
0.9 4.48935e-05 4.50291e-05 8.31416e-05
1.05 3.71003e-05 4.78004e-05 8.31416e-05
1.2 3.05564e-05 5.08231e-05 8.31416e-05
1.35 2.61856e-05 5.28313e-05 8.31416e-05
1.5 2.00076e-05 5.73068e-05 8.31416e-05
1.8 1.53513e-05 5.98066e-05 8.31416e-05
2.4 1.05063e-05 6.30361e-05 8.31416e-05
3 7.41771e-06 6.59394e-05 8.31416e-05
3.6 0 7.35747e-05 8.31416e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000140175 1.46544e-05 8.31416e-05
0.6 7.96936e-05 1.62943e-05 8.31416e-05
0.75 6.66489e-05 1.76954e-05 8.31416e-05
0.9 5.85025e-05 1.82527e-05 8.31416e-05
1.05 5.14615e-05 1.91808e-05 8.31416e-05
1.2 4.47278e-05 2.11824e-05 8.31416e-05
1.35 4.00772e-05 2.25606e-05 8.31416e-05
1.5 3.34277e-05 2.66501e-05 8.31416e-05
1.8 2.76247e-05 2.87572e-05 8.31416e-05
2.4 2.01469e-05 3.18759e-05 8.31416e-05
3 1.50997e-05 3.45089e-05 8.31416e-05
3.6 0 4.83455e-05 8.31416e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 3.85072e-05 8.31416e-05
0.3 0 3.01556e-05 8.31416e-05
0.6 0 2.5149e-05 8.31416e-05
0.75 0 2.30367e-05 8.31416e-05
0.9 0 2.12534e-05 8.31416e-05
1.05 0 1.9782e-05 8.31416e-05
1.2 0 1.82214e-05 8.31416e-05
1.35 0 1.72774e-05 8.31416e-05
1.5 0 1.65106e-05 8.31416e-05
1.8 0 1.53432e-05 8.31416e-05
2.4 0 1.36758e-05 8.31416e-05
3 0 1.22058e-05 8.31416e-05
3.6 0 1.081e-05 8.31416e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 2.21675e-05 8.31416e-05
0.3 0 2.00002e-05 8.31416e-05
0.6 0 1.91215e-05 8.31416e-05
0.75 0 1.86582e-05 8.31416e-05
0.9 0 1.81798e-05 8.31416e-05
1.05 0 1.76901e-05 8.31416e-05
1.2 0 1.68822e-05 8.31416e-05
1.35 0 1.63993e-05 8.31416e-05
1.5 0 1.59259e-05 8.31416e-05
1.8 0 1.50316e-05 8.31416e-05
2.4 0 1.35353e-05 8.31416e-05
3 0 1.24338e-05 8.31416e-05
3.6 0 1.16745e-05 8.31416e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.00013111 2.80842e-05 8.31416e-05
0.6 6.3731e-05 4.26296e-05 8.31416e-05
0.75 4.98984e-05 4.67934e-05 8.31416e-05
0.9 4.12459e-05 4.91916e-05 8.31416e-05
1.05 3.44301e-05 5.13265e-05 8.31416e-05
1.2 2.79386e-05 5.44243e-05 8.31416e-05
1.35 2.36e-05 5.64935e-05 8.31416e-05
1.5 1.87452e-05 5.97169e-05 8.31416e-05
1.8 1.41858e-05 6.2241e-05 8.31416e-05
2.4 9.61199e-06 6.5411e-05 8.31416e-05
3 6.7497e-06 6.83087e-05 8.31416e-05
3.6 0 7.54357e-05 8.31416e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000136187 1.91389e-05 8.31416e-05
0.6 7.62508e-05 2.01372e-05 8.31416e-05
0.75 6.32123e-05 2.166e-05 8.31416e-05
0.9 5.52146e-05 2.19936e-05 8.31416e-05
1.05 4.90399e-05 2.23067e-05 8.31416e-05
1.2 4.23351e-05 2.43965e-05 8.31416e-05
1.35 3.77281e-05 2.58409e-05 8.31416e-05
1.5 3.23347e-05 2.88066e-05 8.31416e-05
1.8 2.65807e-05 3.11811e-05 8.31416e-05
2.4 1.90483e-05 3.50262e-05 8.31416e-05
3 1.38838e-05 3.82661e-05 8.31416e-05
3.6 0 5.10799e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000130463 3.46028e-05 8.31416e-05
0.6 6.14767e-05 5.13019e-05 8.31416e-05
0.75 4.76882e-05 5.56297e-05 8.31416e-05
0.9 3.90712e-05 5.83052e-05 8.31416e-05
1.05 3.22341e-05 6.07652e-05 8.31416e-05
1.2 2.57497e-05 6.41631e-05 8.31416e-05
1.35 2.13483e-05 6.64895e-05 8.31416e-05
1.5 1.64351e-05 6.99231e-05 8.31416e-05
1.8 1.16403e-05 7.28914e-05 8.31416e-05
2.4 6.74808e-06 7.66804e-05 8.31416e-05
3 4.16879e-06 7.95897e-05 8.31416e-05
3.6 0 8.44473e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000135514 2.16781e-05 8.31416e-05
0.6 7.419e-05 2.46774e-05 8.31416e-05
0.75 6.09601e-05 2.66896e-05 8.31416e-05
0.9 5.27865e-05 2.74323e-05 8.31416e-05
1.05 4.65146e-05 2.8029e-05 8.31416e-05
1.2 3.99084e-05 3.02435e-05 8.31416e-05
1.35 3.53859e-05 3.17739e-05 8.31416e-05
1.5 3.00802e-05 3.48175e-05 8.31416e-05
1.8 2.44429e-05 3.73692e-05 8.31416e-05
2.4 1.69841e-05 4.15359e-05 8.31416e-05
3 1.19713e-05 4.48686e-05 8.31416e-05
3.6 0 5.59586e-05 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000124023 4.81241e-05 8.31416e-05
0.6 5.5732e-05 6.81708e-05 8.31416e-05
0.75 4.23479e-05 7.49865e-05 8.31416e-05
0.9 3.3955e-05 7.98024e-05 8.31416e-05
1.05 2.75282e-05 8.64411e-05 8.31416e-05
1.2 2.18668e-05 9.0314e-05 8.31416e-05
1.35 1.83112e-05 9.26748e-05 8.31416e-05
1.5 1.43465e-05 9.57613e-05 8.31416e-05
1.8 1.10711e-05 9.77788e-05 8.31416e-05
2.4 7.06034e-06 0.000100394 8.31416e-05
3 4.69938e-06 0.000103191 8.31416e-05
3.6 0 0.000110319 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000130844 2.78049e-05 8.31416e-05
0.6 6.47308e-05 4.00049e-05 8.31416e-05
0.75 5.24353e-05 4.338e-05 8.31416e-05
0.9 4.37548e-05 4.66835e-05 8.31416e-05
1.05 3.70952e-05 4.97306e-05 8.31416e-05
1.2 2.80431e-05 5.45739e-05 8.31416e-05
1.35 2.3947e-05 5.67216e-05 8.31416e-05
1.5 1.93211e-05 5.98575e-05 8.31416e-05
1.8 1.49852e-05 6.20868e-05 8.31416e-05
2.4 8.75022e-06 6.57655e-05 8.31416e-05
3 5.19751e-06 6.83347e-05 8.31416e-05
3.6 0 7.4217e-05 8.31416e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000168094
0 0.66 0 0.000168094
0 0.96 0 0.000168094
0 1.47 0 0.000168094
0 1.62 0 0.000168094
0 1.92 0 0.000168094
0 2.43 0 0.000168094
0 2.58 0 0.000168094
0 2.88 0 0.000168094
0 3.84 0 0.000168094
0.66 0.66 0 0.000168094
0.66 0.96 0 0.000168094
0.66 1.47 0 0.000168094
0.66 1.62 0 0.000168094
0.66 1.92 0 0.000168094
0.66 2.43 0 0.000168094
0.66 2.58 0 0.000168094
0.66 2.88 0 0.000168094
0.66 3.84 0 0.000168094
0.96 0.96 0 0.000168094
0.96 1.47 0 0.000168094
0.96 1.62 0 0.000168094
0.96 1.92 0 0.000168094
0.96 2.43 0 0.000168094
0.96 2.58 0 0.000168094
0.96 2.88 0 0.000168094
0.96 3.84 0 0.000168094
1.47 1.47 0 0.000168094
1.47 1.62 0 0.000168094
1.47 1.92 0 0.000168094
1.47 2.43 0 0.000168094
1.47 2.58 0 0.000168094
1.47 2.88 0 0.000168094
1.47 3.84 0 0.000168094
1.62 1.62 0 0.000168094
1.62 1.92 0 0.000168094
1.62 2.43 0 0.000168094
1.62 2.58 0 0.000168094
1.62 2.88 0 0.000168094
1.62 3.84 0 0.000168094
1.92 1.92 0 0.000168094
1.92 2.43 0 0.000168094
1.92 2.58 0 0.000168094
1.92 2.88 0 0.000168094
1.92 3.84 0 0.000168094
2.43 2.43 0 0.000168094
2.43 2.58 0 0.000168094
2.43 2.88 0 0.000168094
2.43 3.84 0 0.000168094
2.58 2.58 0 0.000168094
2.58 2.88 0 0.000168094
2.58 3.84 0 0.000168094
2.88 2.88 0 0.000168094
2.88 3.84 0 0.000168094
3.84 0 3.84 0.000168094
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000146568 5.02495e-06 8.4047e-05
0.6 8.65107e-05 7.72704e-06 8.4047e-05
0.75 7.44525e-05 8.10027e-06 8.4047e-05
0.9 6.91912e-05 6.92988e-06 8.4047e-05
1.05 6.10527e-05 7.63648e-06 8.4047e-05
1.2 4.90899e-05 1.52999e-05 8.4047e-05
1.35 4.47325e-05 1.6183e-05 8.4047e-05
1.5 4.10382e-05 1.70125e-05 8.4047e-05
1.8 3.51456e-05 1.84732e-05 8.4047e-05
2.4 2.72684e-05 2.05896e-05 8.4047e-05
3 2.27245e-05 2.16227e-05 8.4047e-05
3.6 0 4.21628e-05 8.4047e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000139132 1.26134e-05 8.4047e-05
0.6 8.14751e-05 1.24631e-05 8.4047e-05
0.75 6.96557e-05 1.26639e-05 8.4047e-05
0.9 6.39559e-05 1.16561e-05 8.4047e-05
1.05 5.80155e-05 1.14228e-05 8.4047e-05
1.2 4.84838e-05 1.68488e-05 8.4047e-05
1.35 4.4164e-05 1.77571e-05 8.4047e-05
1.5 4.04466e-05 1.85645e-05 8.4047e-05
1.8 3.44414e-05 1.98822e-05 8.4047e-05
2.4 2.65257e-05 2.16293e-05 8.4047e-05
3 2.22986e-05 2.24663e-05 8.4047e-05
3.6 0 4.30286e-05 8.4047e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000138894 1.35323e-05 8.4047e-05
0.6 8.12519e-05 1.35359e-05 8.4047e-05
0.75 6.93507e-05 1.41118e-05 8.4047e-05
0.9 6.32992e-05 1.31999e-05 8.4047e-05
1.05 5.69962e-05 1.29368e-05 8.4047e-05
1.2 4.73217e-05 1.82256e-05 8.4047e-05
1.35 4.29978e-05 1.90478e-05 8.4047e-05
1.5 3.93936e-05 1.98249e-05 8.4047e-05
1.8 3.37407e-05 2.12537e-05 8.4047e-05
2.4 2.61844e-05 2.36108e-05 8.4047e-05
3 2.15726e-05 2.51067e-05 8.4047e-05
3.6 0 4.46569e-05 8.4047e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000140746 1.25047e-05 8.4047e-05
0.6 8.04344e-05 1.50092e-05 8.4047e-05
0.75 6.85846e-05 1.55484e-05 8.4047e-05
0.9 6.25594e-05 1.46735e-05 8.4047e-05
1.05 5.62133e-05 1.45239e-05 8.4047e-05
1.2 4.70636e-05 1.9347e-05 8.4047e-05
1.35 4.25966e-05 2.03596e-05 8.4047e-05
1.5 3.88407e-05 2.13303e-05 8.4047e-05
1.8 3.29027e-05 2.31458e-05 8.4047e-05
2.4 2.49448e-05 2.623e-05 8.4047e-05
3 2.01555e-05 2.832e-05 8.4047e-05
3.6 0 4.68405e-05 8.4047e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000130323 2.7435e-05 8.4047e-05
0.6 7.04223e-05 3.27562e-05 8.4047e-05
0.75 5.49589e-05 3.93818e-05 8.4047e-05
0.9 4.83178e-05 4.11065e-05 8.4047e-05
1.05 4.12148e-05 4.33268e-05 8.4047e-05
1.2 3.03307e-05 5.11997e-05 8.4047e-05
1.35 2.59923e-05 5.32006e-05 8.4047e-05
1.5 2.2525e-05 5.4826e-05 8.4047e-05
1.8 1.75039e-05 5.72524e-05 8.4047e-05
2.4 1.2014e-05 6.00704e-05 8.4047e-05
3 9.63567e-06 6.14787e-05 8.4047e-05
3.6 0 7.15441e-05 8.4047e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000135394 1.99172e-05 8.4047e-05
0.6 7.39111e-05 2.64392e-05 8.4047e-05
0.75 6.12317e-05 2.88519e-05 8.4047e-05
0.9 5.4377e-05 2.97303e-05 8.4047e-05
1.05 4.71828e-05 3.13796e-05 8.4047e-05
1.2 3.38324e-05 4.13796e-05 8.4047e-05
1.35 2.91927e-05 4.35272e-05 8.4047e-05
1.5 2.41842e-05 4.66622e-05 8.4047e-05
1.8 1.84051e-05 4.9899e-05 8.4047e-05
2.4 1.12487e-05 5.44266e-05 8.4047e-05
3 7.63229e-06 5.67835e-05 8.4047e-05
3.6 0 6.38373e-05 8.4047e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.72749e-05 8.4047e-05
0.3 0 3.51949e-05 8.4047e-05
0.6 0 3.04805e-05 8.4047e-05
0.75 0 2.825e-05 8.4047e-05
0.9 0 2.61827e-05 8.4047e-05
1.05 0 2.43165e-05 8.4047e-05
1.2 0 2.26714e-05 8.4047e-05
1.35 0 2.12505e-05 8.4047e-05
1.5 0 2.00436e-05 8.4047e-05
1.8 0 1.81939e-05 8.4047e-05
2.4 0 1.60884e-05 8.4047e-05
3 0 1.50833e-05 8.4047e-05
3.6 0 1.44881e-05 8.4047e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000130415 2.48133e-05 8.4047e-05
0.6 7.05944e-05 2.94872e-05 8.4047e-05
0.75 5.80652e-05 3.17832e-05 8.4047e-05
0.9 5.10577e-05 3.27111e-05 8.4047e-05
1.05 4.50728e-05 3.3816e-05 8.4047e-05
1.2 3.3103e-05 4.25359e-05 8.4047e-05
1.35 2.86203e-05 4.45457e-05 8.4047e-05
1.5 2.37263e-05 4.75243e-05 8.4047e-05
1.8 1.80881e-05 5.04655e-05 8.4047e-05
2.4 1.1084e-05 5.46675e-05 8.4047e-05
3 7.59864e-06 5.70364e-05 8.4047e-05
3.6 0 6.4353e-05 8.4047e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000130619 2.48189e-05 8.4047e-05
0.6 6.96794e-05 3.06705e-05 8.4047e-05
0.75 5.74717e-05 3.28595e-05 8.4047e-05
0.9 5.05803e-05 3.36095e-05 8.4047e-05
1.05 4.45757e-05 3.45797e-05 8.4047e-05
1.2 3.2531e-05 4.32459e-05 8.4047e-05
1.35 2.79494e-05 4.5307e-05 8.4047e-05
1.5 2.29816e-05 4.83948e-05 8.4047e-05
1.8 1.72821e-05 5.16195e-05 8.4047e-05
2.4 1.02488e-05 5.63096e-05 8.4047e-05
3 6.59638e-06 5.89457e-05 8.4047e-05
3.6 0 6.50934e-05 8.4047e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000131118 2.47014e-05 8.4047e-05
0.6 6.94604e-05 3.13388e-05 8.4047e-05
0.75 5.69323e-05 3.38298e-05 8.4047e-05
0.9 4.9774e-05 3.48387e-05 8.4047e-05
1.05 4.36041e-05 3.60161e-05 8.4047e-05
1.2 3.18776e-05 4.44441e-05 8.4047e-05
1.35 2.73375e-05 4.65611e-05 8.4047e-05
1.5 2.24295e-05 4.96856e-05 8.4047e-05
1.8 1.68119e-05 5.30052e-05 8.4047e-05
2.4 9.73429e-06 5.8046e-05 8.4047e-05
3 5.9483e-06 6.1081e-05 8.4047e-05
3.6 0 6.67856e-05 8.4047e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000121594 3.98517e-05 8.4047e-05
0.6 5.85944e-05 5.19191e-05 8.4047e-05
0.75 4.42835e-05 5.86967e-05 8.4047e-05
0.9 3.6782e-05 6.21109e-05 8.4047e-05
1.05 3.02917e-05 6.69761e-05 8.4047e-05
1.2 2.21398e-05 7.30627e-05 8.4047e-05
1.35 1.81325e-05 7.5572e-05 8.4047e-05
1.5 1.50838e-05 7.75133e-05 8.4047e-05
1.8 1.08526e-05 8.04382e-05 8.4047e-05
2.4 6.6501e-06 8.36963e-05 8.4047e-05
3 4.87423e-06 8.54392e-05 8.4047e-05
3.6 0 9.10599e-05 8.4047e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.83563e-05
0 1.73 0 1.83563e-05
0 3.33 0 1.83563e-05
0 4.26 0 1.83563e-05
0 5.06 0 1.83563e-05
0 6.66 0 1.83563e-05
0 7.59 0 1.83563e-05
0 8.39 0 1.83563e-05
0 9.99 0 1.83563e-05
0 13.32 0 1.83563e-05
1.73 1.73 0 1.83563e-05
1.73 3.33 0 1.83563e-05
1.73 4.26 0 1.83563e-05
1.73 5.06 0 1.83563e-05
1.73 6.66 0 1.83563e-05
1.73 7.59 0 1.83563e-05
1.73 8.39 0 1.83563e-05
1.73 9.99 0 1.83563e-05
1.73 13.32 0 1.83563e-05
3.33 3.33 0 1.83563e-05
3.33 4.26 0 1.83563e-05
3.33 5.06 0 1.83563e-05
3.33 6.66 0 1.83563e-05
3.33 7.59 0 1.83563e-05
3.33 8.39 0 1.83563e-05
3.33 9.99 0 1.83563e-05
3.33 13.32 0 1.83563e-05
4.26 4.26 0 1.83563e-05
4.26 5.06 0 1.83563e-05
4.26 6.66 0 1.83563e-05
4.26 7.59 0 1.83563e-05
4.26 8.39 0 1.83563e-05
4.26 9.99 0 1.83563e-05
4.26 13.32 0 1.83563e-05
5.06 5.06 0 1.83563e-05
5.06 6.66 0 1.83563e-05
5.06 7.59 0 1.83563e-05
5.06 8.39 0 1.83563e-05
5.06 9.99 0 1.83563e-05
5.06 13.32 0 1.83563e-05
6.66 6.66 0 1.83563e-05
6.66 7.59 0 1.83563e-05
6.66 8.39 0 1.83563e-05
6.66 9.99 0 1.83563e-05
6.66 13.32 0 1.83563e-05
7.59 7.59 0 1.83563e-05
7.59 8.39 0 1.83563e-05
7.59 9.99 0 1.83563e-05
7.59 13.32 0 1.83563e-05
8.39 8.39 0 1.83563e-05
8.39 9.99 0 1.83563e-05
8.39 13.32 0 1.83563e-05
9.99 9.99 0 1.83563e-05
9.99 13.32 0 1.83563e-05
13.32 0 13.32 1.83563e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 7.70727e-05 1.28051e-05 9.17806e-06
3.2 4.16244e-05 1.8829e-05 9.17806e-06
4 3.48304e-05 2.0061e-05 9.17806e-06
4.8 2.63231e-05 2.44747e-05 9.17806e-06
5.6 2.11476e-05 2.79939e-05 9.17806e-06
6.4 1.8024e-05 2.94438e-05 9.17806e-06
7.2 1.52959e-05 3.08495e-05 9.17806e-06
8 1.31579e-05 3.18988e-05 9.17806e-06
9.6 0 4.2381e-05 9.17806e-06
12.8 0 4.2381e-05 9.17806e-06
16 0 4.2381e-05 9.17806e-06
19.2 0 4.2381e-05 9.17806e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 7.19495e-05 1.88937e-05 9.17806e-06
3.2 3.77517e-05 2.41014e-05 9.17806e-06
4 3.12477e-05 2.54782e-05 9.17806e-06
4.8 2.41341e-05 2.88483e-05 9.17806e-06
5.6 2.0153e-05 3.08419e-05 9.17806e-06
6.4 1.72664e-05 3.20493e-05 9.17806e-06
7.2 1.49348e-05 3.3145e-05 9.17806e-06
8 1.29865e-05 3.41298e-05 9.17806e-06
9.6 0 4.51026e-05 9.17806e-06
12.8 0 4.51026e-05 9.17806e-06
16 0 4.51026e-05 9.17806e-06
19.2 0 4.51026e-05 9.17806e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 7.10698e-05 2.03921e-05 9.17806e-06
3.2 3.71086e-05 2.56048e-05 9.17806e-06
4 3.09144e-05 2.68625e-05 9.17806e-06
4.8 2.38044e-05 3.0346e-05 9.17806e-06
5.6 1.95741e-05 3.26598e-05 9.17806e-06
6.4 1.63623e-05 3.43051e-05 9.17806e-06
7.2 1.36436e-05 3.6008e-05 9.17806e-06
8 1.15478e-05 3.73638e-05 9.17806e-06
9.6 0 4.69941e-05 9.17806e-06
12.8 0 4.69941e-05 9.17806e-06
16 0 4.69941e-05 9.17806e-06
19.2 0 4.69943e-05 9.17806e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 7.02531e-05 2.24514e-05 9.17806e-06
3.2 3.64029e-05 2.78811e-05 9.17806e-06
4 3.02924e-05 2.92348e-05 9.17806e-06
4.8 2.33056e-05 3.29001e-05 9.17806e-06
5.6 1.89839e-05 3.55508e-05 9.17806e-06
6.4 1.56356e-05 3.74956e-05 9.17806e-06
7.2 1.27249e-05 3.94579e-05 9.17806e-06
8 1.04566e-05 4.11284e-05 9.17806e-06
9.6 0 4.95055e-05 9.17806e-06
12.8 0 4.95055e-05 9.17806e-06
16 0 4.95055e-05 9.17806e-06
19.2 0 4.95055e-05 9.17806e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 6.80015e-05 3.08859e-05 9.17806e-06
3.2 3.36584e-05 3.85538e-05 9.17806e-06
4 2.75006e-05 4.04561e-05 9.17806e-06
4.8 2.0938e-05 4.40865e-05 9.17806e-06
5.6 1.71447e-05 4.65752e-05 9.17806e-06
6.4 1.43547e-05 4.82697e-05 9.17806e-06
7.2 1.19269e-05 4.99141e-05 9.17806e-06
8 1.01083e-05 5.09463e-05 9.17806e-06
9.6 0 5.93995e-05 9.17806e-06
12.8 0 5.93995e-05 9.17806e-06
16 0 5.93995e-05 9.17806e-06
19.2 0 5.93995e-05 9.17806e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 4.59423e-05 8.66424e-05 9.17806e-06
3.2 1.95217e-05 9.2759e-05 9.17806e-06
4 1.68641e-05 9.08466e-05 9.17806e-06
4.8 1.25324e-05 9.34708e-05 9.17806e-06
5.6 1.03412e-05 9.52085e-05 9.17806e-06
6.4 8.94776e-06 9.61762e-05 9.17806e-06
7.2 7.93763e-06 9.69672e-05 9.17806e-06
8 8.77156e-06 9.43731e-05 9.17806e-06
9.6 0 0.000104426 9.17806e-06
12.8 0 0.000104418 9.17806e-06
16 0 0.000104412 9.17806e-06
19.2 0 0.000104445 9.17806e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 1

DensityModel 2

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0681705
0 0.31 0 0.0681705
0 0.48 0 0.0681705
0 0.705 0 0.0681705
0 0.79 0 0.0681705
0 0.96 0 0.0681705
0 1.185 0 0.0681705
0 1.27 0 0.0681705
0 1.44 0 0.0681705
0 1.92 0 0.0681705
0.31 0.31 0 0.0681705
0.31 0.48 0 0.0681705
0.31 0.705 0 0.0681705
0.31 0.79 0 0.0681705
0.31 0.96 0 0.0681705
0.31 1.185 0 0.0681705
0.31 1.27 0 0.0681705
0.31 1.44 0 0.0681705
0.31 1.92 0 0.0681705
0.48 0.48 0 0.0681705
0.48 0.705 0 0.0681705
0.48 0.79 0 0.0681705
0.48 0.96 0 0.0681705
0.48 1.185 0 0.0681705
0.48 1.27 0 0.0681705
0.48 1.44 0 0.0681705
0.48 1.92 0 0.0681705
0.705 0.705 0 0.0681705
0.705 0.79 0 0.0681705
0.705 0.96 0 0.0681705
0.705 1.185 0 0.0681705
0.705 1.27 0 0.0681705
0.705 1.44 0 0.0681705
0.705 1.92 0 0.0681705
0.79 0.79 0 0.0681705
0.79 0.96 0 0.0681705
0.79 1.185 0 0.0681705
0.79 1.27 0 0.0681705
0.79 1.44 0 0.0681705
0.79 1.92 0 0.0681705
0.96 0.96 0 0.0681705
0.96 1.185 0 0.0681705
0.96 1.27 0 0.0681705
0.96 1.44 0 0.0681705
0.96 1.92 0 0.0681705
1.185 1.185 0 0.0681705
1.185 1.27 0 0.0681705
1.185 1.44 0 0.0681705
1.185 1.92 0 0.0681705
1.27 1.27 0 0.0681705
1.27 1.44 0 0.0681705
1.27 1.92 0 0.0681705
1.44 1.44 0 0.0681705
1.44 1.92 0 0.0681705
1.92 0 1.92 0.0681705
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 8.61372e-05 9.44952e-06 0.0340853
0.34 5.12844e-05 1.33801e-05 0.0340853
0.425 4.3541e-05 1.4824e-05 0.0340853
0.51 3.88428e-05 1.54397e-05 0.0340853
0.595 3.34495e-05 1.78955e-05 0.0340853
0.68 3.09507e-05 1.8301e-05 0.0340853
0.765 2.52695e-05 2.19586e-05 0.0340853
0.85 2.37271e-05 2.22492e-05 0.0340853
1.02 2.19149e-05 2.261e-05 0.0340853
1.36 1.91487e-05 2.24345e-05 0.0340853
1.7 0 3.91595e-05 0.0340853
2.04 0 3.91595e-05 0.0340853
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 6.80777e-05 3.34433e-05 0.0340853
0.34 3.61876e-05 3.33933e-05 0.0340853
0.425 3.23648e-05 3.24802e-05 0.0340853
0.51 2.79091e-05 3.41271e-05 0.0340853
0.595 2.3655e-05 3.64674e-05 0.0340853
0.68 1.98402e-05 3.89822e-05 0.0340853
0.765 1.61768e-05 4.11339e-05 0.0340853
0.85 1.35702e-05 4.31009e-05 0.0340853
1.02 9.32626e-06 4.69828e-05 0.0340853
1.36 1.29978e-05 4.73246e-05 0.0340853
1.7 0 5.96826e-05 0.0340853
2.04 0 5.96818e-05 0.0340853
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 7.93746e-05 1.67654e-05 0.0340853
0.34 4.55879e-05 1.9837e-05 0.0340853
0.425 3.80076e-05 2.15216e-05 0.0340853
0.51 3.33286e-05 2.23055e-05 0.0340853
0.595 2.90274e-05 2.37905e-05 0.0340853
0.68 2.61838e-05 2.46021e-05 0.0340853
0.765 2.17494e-05 2.71055e-05 0.0340853
0.85 1.97574e-05 2.80056e-05 0.0340853
1.02 1.68608e-05 2.99991e-05 0.0340853
1.36 1.18524e-05 3.36875e-05 0.0340853
1.7 0 4.32588e-05 0.0340853
2.04 0 4.32588e-05 0.0340853
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 8.1339e-05 1.43746e-05 0.0340853
0.34 4.83253e-05 1.64574e-05 0.0340853
0.425 4.06995e-05 1.81761e-05 0.0340853
0.51 3.59956e-05 1.90192e-05 0.0340853
0.595 3.09877e-05 2.11822e-05 0.0340853
0.68 2.81327e-05 2.18956e-05 0.0340853
0.765 2.30317e-05 2.48824e-05 0.0340853
0.85 2.11752e-05 2.54048e-05 0.0340853
1.02 1.88539e-05 2.62139e-05 0.0340853
1.36 1.58653e-05 2.65591e-05 0.0340853
1.7 0 4.12234e-05 0.0340853
2.04 0 4.12234e-05 0.0340853
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 8.24722e-05 1.31413e-05 0.0340853
0.34 4.90302e-05 1.57381e-05 0.0340853
0.425 4.16521e-05 1.71229e-05 0.0340853
0.51 3.71326e-05 1.76188e-05 0.0340853
0.595 3.23129e-05 1.94861e-05 0.0340853
0.68 2.95651e-05 2.00547e-05 0.0340853
0.765 2.44851e-05 2.3032e-05 0.0340853
0.85 2.26448e-05 2.35791e-05 0.0340853
1.02 2.0326e-05 2.45073e-05 0.0340853
1.36 1.72821e-05 2.52146e-05 0.0340853
1.7 0 4.02602e-05 0.0340853
2.04 0 4.02602e-05 0.0340853
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 8.19265e-05 1.35744e-05 0.0340853
0.34 4.90529e-05 1.5458e-05 0.0340853
0.425 4.1736e-05 1.67972e-05 0.0340853
0.51 3.7272e-05 1.72522e-05 0.0340853
0.595 3.24866e-05 1.90445e-05 0.0340853
0.68 2.97193e-05 1.95578e-05 0.0340853
0.765 2.46764e-05 2.24312e-05 0.0340853
0.85 2.28305e-05 2.29498e-05 0.0340853
1.02 2.0544e-05 2.39104e-05 0.0340853
1.36 1.7595e-05 2.51078e-05 0.0340853
1.7 0 3.97983e-05 0.0340853
2.04 0 3.97982e-05 0.0340853
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 2.66887e-05 0.0340853
0.17 0 2.24007e-05 0.0340853
0.34 0 1.9211e-05 0.0340853
0.425 0 1.79128e-05 0.0340853
0.51 0 1.68696e-05 0.0340853
0.595 0 1.60676e-05 0.0340853
0.68 0 1.54732e-05 0.0340853
0.765 0 1.50473e-05 0.0340853
0.85 0 1.47528e-05 0.0340853
1.02 0 1.44392e-05 0.0340853
1.36 0 1.43783e-05 0.0340853
1.7 0 9.51316e-06 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 1.30121e-05 0.0340853
0.17 0 1.24717e-05 0.0340853
0.34 0 1.19979e-05 0.0340853
0.425 0 1.17403e-05 0.0340853
0.51 0 1.14754e-05 0.0340853
0.595 0 1.12057e-05 0.0340853
0.68 0 1.09324e-05 0.0340853
0.765 0 1.06556e-05 0.0340853
0.85 0 1.03755e-05 0.0340853
1.02 0 9.80591e-06 0.0340853
1.36 0 1.0251e-05 0.0340853
1.7 0 9.16462e-06 0.0340853
2.04 0 8.19109e-06 0.0340853
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 9.24997e-06 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 6.03723e-06 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
2.04 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00120566
0 0.23 0 0.00120566
0 0.37 0 0.00120566
0 0.53 0 0.00120566
0 0.6 0 0.00120566
0 0.74 0 0.00120566
0 0.9 0 0.00120566
0 0.97 0 0.00120566
0 1.11 0 0.00120566
0 1.48 0 0.00120566
0.23 0.23 0 0.00120566
0.23 0.37 0 0.00120566
0.23 0.53 0 0.00120566
0.23 0.6 0 0.00120566
0.23 0.74 0 0.00120566
0.23 0.9 0 0.00120566
0.23 0.97 0 0.00120566
0.23 1.11 0 0.00120566
0.23 1.48 0 0.00120566
0.37 0.37 0 0.00120566
0.37 0.53 0 0.00120566
0.37 0.6 0 0.00120566
0.37 0.74 0 0.00120566
0.37 0.9 0 0.00120566
0.37 0.97 0 0.00120566
0.37 1.11 0 0.00120566
0.37 1.48 0 0.00120566
0.53 0.53 0 0.00120566
0.53 0.6 0 0.00120566
0.53 0.74 0 0.00120566
0.53 0.9 0 0.00120566
0.53 0.97 0 0.00120566
0.53 1.11 0 0.00120566
0.53 1.48 0 0.00120566
0.6 0.6 0 0.00120566
0.6 0.74 0 0.00120566
0.6 0.9 0 0.00120566
0.6 0.97 0 0.00120566
0.6 1.11 0 0.00120566
0.6 1.48 0 0.00120566
0.74 0.74 0 0.00120566
0.74 0.9 0 0.00120566
0.74 0.97 0 0.00120566
0.74 1.11 0 0.00120566
0.74 1.48 0 0.00120566
0.9 0.9 0 0.00120566
0.9 0.97 0 0.00120566
0.9 1.11 0 0.00120566
0.9 1.48 0 0.00120566
0.97 0.97 0 0.00120566
0.97 1.11 0 0.00120566
0.97 1.48 0 0.00120566
1.11 1.11 0 0.00120566
1.11 1.48 0 0.00120566
1.48 0 1.48 0.00120566
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000138118 5.73561e-06 0.000602828
0.28 8.52281e-05 7.80545e-06 0.000602828
0.35 7.30176e-05 8.35076e-06 0.000602828
0.42 6.58219e-05 8.11883e-06 0.000602828
0.49 5.71535e-05 1.02824e-05 0.000602828
0.56 5.08842e-05 1.18282e-05 0.000602828
0.63 4.11549e-05 1.83851e-05 0.000602828
0.7 3.76403e-05 1.93881e-05 0.000602828
0.84 3.18492e-05 2.13832e-05 0.000602828
1.12 2.39134e-05 2.43226e-05 0.000602828
1.4 1.83959e-05 2.6658e-05 0.000602828
1.68 0 4.29842e-05 0.000602828
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000130654 1.567e-05 0.000602828
0.28 7.42447e-05 2.18678e-05 0.000602828
0.35 6.24752e-05 2.35482e-05 0.000602828
0.42 5.54264e-05 2.41468e-05 0.000602828
0.49 4.83787e-05 2.59601e-05 0.000602828
0.56 4.21914e-05 2.84295e-05 0.000602828
0.63 3.48531e-05 3.32113e-05 0.000602828
0.7 3.12986e-05 3.48401e-05 0.000602828
0.84 2.36804e-05 3.98139e-05 0.000602828
1.12 1.6881e-05 4.38251e-05 0.000602828
1.4 1.26539e-05 4.67742e-05 0.000602828
1.68 0 5.8778e-05 0.000602828
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000125315 2.16179e-05 0.000602828
0.28 6.95395e-05 2.85793e-05 0.000602828
0.35 5.66731e-05 3.2483e-05 0.000602828
0.42 4.79433e-05 3.60836e-05 0.000602828
0.49 4.07063e-05 3.92515e-05 0.000602828
0.56 3.44506e-05 4.25667e-05 0.000602828
0.63 2.73011e-05 4.77156e-05 0.000602828
0.7 2.39016e-05 4.955e-05 0.000602828
0.84 1.85187e-05 5.2665e-05 0.000602828
1.12 9.52476e-06 5.89915e-05 0.000602828
1.4 7.1476e-06 6.0619e-05 0.000602828
1.68 0 6.7952e-05 0.000602828
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000130705 1.50119e-05 0.000602828
0.28 7.79806e-05 1.64308e-05 0.000602828
0.35 6.60048e-05 1.74046e-05 0.000602828
0.42 5.88336e-05 1.74203e-05 0.000602828
0.49 5.20059e-05 1.8409e-05 0.000602828
0.56 4.54686e-05 2.03003e-05 0.000602828
0.63 3.79594e-05 2.46138e-05 0.000602828
0.7 3.42363e-05 2.57893e-05 0.000602828
0.84 2.82732e-05 2.79929e-05 0.000602828
1.12 2.04041e-05 3.13738e-05 0.000602828
1.4 1.49853e-05 3.43422e-05 0.000602828
1.68 0 4.79875e-05 0.000602828
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000132208 1.2287e-05 0.000602828
0.28 8.20972e-05 1.12027e-05 0.000602828
0.35 6.98093e-05 1.22795e-05 0.000602828
0.42 6.24113e-05 1.21279e-05 0.000602828
0.49 5.46395e-05 1.37539e-05 0.000602828
0.56 4.82341e-05 1.53582e-05 0.000602828
0.63 3.98791e-05 2.04812e-05 0.000602828
0.7 3.64359e-05 2.14036e-05 0.000602828
0.84 3.09173e-05 2.32351e-05 0.000602828
1.12 2.32619e-05 2.6199e-05 0.000602828
1.4 1.74854e-05 2.89191e-05 0.000602828
1.68 0 4.43916e-05 0.000602828
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000129054 1.46584e-05 0.000602828
0.28 7.94672e-05 1.26295e-05 0.000602828
0.35 6.82334e-05 1.28446e-05 0.000602828
0.42 6.16935e-05 1.22491e-05 0.000602828
0.49 5.4609e-05 1.35439e-05 0.000602828
0.56 4.85906e-05 1.49208e-05 0.000602828
0.63 4.0474e-05 1.9796e-05 0.000602828
0.7 3.71105e-05 2.05385e-05 0.000602828
0.84 3.16873e-05 2.20032e-05 0.000602828
1.12 2.4533e-05 2.42645e-05 0.000602828
1.4 1.95902e-05 2.6429e-05 0.000602828
1.68 0 4.43317e-05 0.000602828
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 3.31347e-05 0.000602828
0.14 0 2.73289e-05 0.000602828
0.28 0 2.33157e-05 0.000602828
0.35 0 2.14946e-05 0.000602828
0.42 0 1.99143e-05 0.000602828
0.49 0 1.8593e-05 0.000602828
0.56 0 1.71886e-05 0.000602828
0.63 0 1.63751e-05 0.000602828
0.7 0 1.57544e-05 0.000602828
0.84 0 1.49643e-05 0.000602828
1.12 0 1.45003e-05 0.000602828
1.4 0 1.4692e-05 0.000602828
1.68 0 1.49947e-05 0.000602828
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 1.71233e-05 0.000602828
0.14 0 1.6158e-05 0.000602828
0.28 0 1.57688e-05 0.000602828
0.35 0 1.55375e-05 0.000602828
0.42 0 1.52888e-05 0.000602828
0.49 0 1.50272e-05 0.000602828
0.56 0 1.44808e-05 0.000602828
0.63 0 1.4219e-05 0.000602828
0.7 0 1.39606e-05 0.000602828
0.84 0 1.34715e-05 0.000602828
1.12 0 1.26613e-05 0.000602828
1.4 0 1.20702e-05 0.000602828
1.68 0 1.16482e-05 0.000602828
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 9.81043e-06 0.000602828
0.14 0 9.44235e-06 0.000602828
0.28 0 9.37367e-06 0.000602828
0.35 0 9.33254e-06 0.000602828
0.42 0 9.28864e-06 0.000602828
0.49 0 9.24217e-06 0.000602828
0.56 0 9.02038e-06 0.000602828
0.63 0 8.97284e-06 0.000602828
0.7 0 8.92341e-06 0.000602828
0.84 0 8.81955e-06 0.000602828
1.12 0 8.59823e-06 0.000602828
1.4 0 8.37071e-06 0.000602828
1.68 0 0 0.000602828
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 8.57973e-06 0.000602828
0.14 0 0 0.000602828
0.28 0 0 0.000602828
0.35 0 0 0.000602828
0.42 0 0 0.000602828
0.49 0 0 0.000602828
0.56 0 0 0.000602828
0.63 0 0 0.000602828
0.7 0 0 0.000602828
0.84 0 0 0.000602828
1.12 0 0 0.000602828
1.4 0 0 0.000602828
1.68 0 0 0.000602828
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000119372 3.57253e-05 0.000602828
0.28 6.27954e-05 4.44719e-05 0.000602828
0.35 4.88178e-05 5.08946e-05 0.000602828
0.42 3.95403e-05 5.63268e-05 0.000602828
0.49 3.34018e-05 6.23328e-05 0.000602828
0.56 2.73394e-05 6.6527e-05 0.000602828
0.63 2.16318e-05 7.10757e-05 0.000602828
0.7 1.83906e-05 7.35041e-05 0.000602828
0.84 1.35103e-05 7.73619e-05 0.000602828
1.12 8.4057e-06 8.16741e-05 0.000602828
1.4 6.46386e-06 8.30622e-05 0.000602828
1.68 0 8.8504e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000124988 2.29842e-05 0.000602828
0.28 6.90886e-05 2.85542e-05 0.000602828
0.35 5.76192e-05 3.0258e-05 0.000602828
0.42 5.06751e-05 3.09869e-05 0.000602828
0.49 4.45953e-05 3.23341e-05 0.000602828
0.56 3.82076e-05 3.51534e-05 0.000602828
0.63 3.19793e-05 3.88739e-05 0.000602828
0.7 2.82205e-05 4.07125e-05 0.000602828
0.84 2.02291e-05 4.60782e-05 0.000602828
1.12 1.35021e-05 5.02313e-05 0.000602828
1.4 9.5176e-06 5.33196e-05 0.000602828
1.68 0 6.26264e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000126034 2.05039e-05 0.000602828
0.28 7.19999e-05 2.42552e-05 0.000602828
0.35 6.00408e-05 2.63318e-05 0.000602828
0.42 5.27087e-05 2.71038e-05 0.000602828
0.49 4.60601e-05 2.87162e-05 0.000602828
0.56 3.97624e-05 3.12743e-05 0.000602828
0.63 3.32514e-05 3.52182e-05 0.000602828
0.7 2.9778e-05 3.67814e-05 0.000602828
0.84 2.22918e-05 4.17105e-05 0.000602828
1.12 1.59869e-05 4.53682e-05 0.000602828
1.4 1.17684e-05 4.82969e-05 0.000602828
1.68 0 5.93339e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000124315 2.20393e-05 0.000602828
0.28 7.07847e-05 2.48307e-05 0.000602828
0.35 5.91661e-05 2.66924e-05 0.000602828
0.42 5.21487e-05 2.73862e-05 0.000602828
0.49 4.57906e-05 2.8894e-05 0.000602828
0.56 3.97363e-05 3.12372e-05 0.000602828
0.63 3.33777e-05 3.49493e-05 0.000602828
0.7 3.0004e-05 3.62833e-05 0.000602828
0.84 2.26829e-05 4.077e-05 0.000602828
1.12 1.67524e-05 4.38231e-05 0.000602828
1.4 1.29366e-05 4.64806e-05 0.000602828
1.68 0 5.88991e-05 0.000602828
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00122133
0 0.34 0 0.00122133
0 0.48 0 0.00122133
0 0.75 0 0.00122133
0 0.82 0 0.00122133
0 0.96 0 0.00122133
0 1.23 0 0.00122133
0 1.3 0 0.00122133
0 1.44 0 0.00122133
0 1.92 0 0.00122133
0.34 0.34 0 0.00122133
0.34 0.48 0 0.00122133
0.34 0.75 0 0.00122133
0.34 0.82 0 0.00122133
0.34 0.96 0 0.00122133
0.34 1.23 0 0.00122133
0.34 1.3 0 0.00122133
0.34 1.44 0 0.00122133
0.34 1.92 0 0.00122133
0.48 0.48 0 0.00122133
0.48 0.75 0 0.00122133
0.48 0.82 0 0.00122133
0.48 0.96 0 0.00122133
0.48 1.23 0 0.00122133
0.48 1.3 0 0.00122133
0.48 1.44 0 0.00122133
0.48 1.92 0 0.00122133
0.75 0.75 0 0.00122133
0.75 0.82 0 0.00122133
0.75 0.96 0 0.00122133
0.75 1.23 0 0.00122133
0.75 1.3 0 0.00122133
0.75 1.44 0 0.00122133
0.75 1.92 0 0.00122133
0.82 0.82 0 0.00122133
0.82 0.96 0 0.00122133
0.82 1.23 0 0.00122133
0.82 1.3 0 0.00122133
0.82 1.44 0 0.00122133
0.82 1.92 0 0.00122133
0.96 0.96 0 0.00122133
0.96 1.23 0 0.00122133
0.96 1.3 0 0.00122133
0.96 1.44 0 0.00122133
0.96 1.92 0 0.00122133
1.23 1.23 0 0.00122133
1.23 1.3 0 0.00122133
1.23 1.44 0 0.00122133
1.23 1.92 0 0.00122133
1.3 1.3 0 0.00122133
1.3 1.44 0 0.00122133
1.3 1.92 0 0.00122133
1.44 1.44 0 0.00122133
1.44 1.92 0 0.00122133
1.92 0 1.92 0.00122133
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000136816 6.4904e-06 0.000610664
0.28 8.34141e-05 9.07691e-06 0.000610664
0.35 7.14996e-05 9.78972e-06 0.000610664
0.42 6.58888e-05 8.30119e-06 0.000610664
0.49 5.83556e-05 9.50429e-06 0.000610664
0.56 4.70158e-05 1.65661e-05 0.000610664
0.63 4.32143e-05 1.7029e-05 0.000610664
0.7 4.01096e-05 1.74903e-05 0.000610664
0.84 3.52495e-05 1.84518e-05 0.000610664
1.12 2.83e-05 2.04259e-05 0.000610664
1.4 2.35213e-05 2.18521e-05 0.000610664
1.68 0 4.29564e-05 0.000610664
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000127192 1.69995e-05 0.000610664
0.28 7.66247e-05 1.63418e-05 0.000610664
0.35 6.50566e-05 1.70294e-05 0.000610664
0.42 5.90549e-05 1.62173e-05 0.000610664
0.49 5.32273e-05 1.65602e-05 0.000610664
0.56 4.46891e-05 2.114e-05 0.000610664
0.63 4.07293e-05 2.19278e-05 0.000610664
0.7 3.74585e-05 2.26078e-05 0.000610664
0.84 3.23579e-05 2.37641e-05 0.000610664
1.12 2.54578e-05 2.5716e-05 0.000610664
1.4 2.10804e-05 2.71969e-05 0.000610664
1.68 0 4.64982e-05 0.000610664
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000124423 2.32963e-05 0.000610664
0.28 6.96191e-05 2.85508e-05 0.000610664
0.35 5.56138e-05 3.34378e-05 0.000610664
0.42 4.92953e-05 3.40191e-05 0.000610664
0.49 4.27985e-05 3.56844e-05 0.000610664
0.56 3.40381e-05 4.10225e-05 0.000610664
0.63 2.98499e-05 4.25768e-05 0.000610664
0.7 2.64613e-05 4.39629e-05 0.000610664
0.84 2.01626e-05 4.76138e-05 0.000610664
1.12 1.40572e-05 5.12535e-05 0.000610664
1.4 1.08465e-05 5.32306e-05 0.000610664
1.68 0 6.30477e-05 0.000610664
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000126123 1.95052e-05 0.000610664
0.28 7.26959e-05 2.23848e-05 0.000610664
0.35 5.95301e-05 2.56742e-05 0.000610664
0.42 5.08436e-05 2.8336e-05 0.000610664
0.49 4.43139e-05 3.00085e-05 0.000610664
0.56 3.54721e-05 3.54467e-05 0.000610664
0.63 3.14061e-05 3.68564e-05 0.000610664
0.7 2.81522e-05 3.8015e-05 0.000610664
0.84 2.33034e-05 3.98469e-05 0.000610664
1.12 1.70668e-05 4.26181e-05 0.000610664
1.4 1.30512e-05 4.46023e-05 0.000610664
1.68 0 5.62342e-05 0.000610664
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000128808 1.51914e-05 0.000610664
0.28 7.72605e-05 1.52063e-05 0.000610664
0.35 6.57281e-05 1.59295e-05 0.000610664
0.42 5.97961e-05 1.5065e-05 0.000610664
0.49 5.40428e-05 1.52938e-05 0.000610664
0.56 4.55078e-05 1.98013e-05 0.000610664
0.63 4.15542e-05 2.05024e-05 0.000610664
0.7 3.82674e-05 2.11168e-05 0.000610664
0.84 3.30494e-05 2.22271e-05 0.000610664
1.12 2.56053e-05 2.43909e-05 0.000610664
1.4 2.05985e-05 2.61987e-05 0.000610664
1.68 0 4.48263e-05 0.000610664
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000131355 1.24995e-05 0.000610664
0.28 8.05674e-05 1.16327e-05 0.000610664
0.35 6.90668e-05 1.23992e-05 0.000610664
0.42 6.29339e-05 1.15131e-05 0.000610664
0.49 5.61372e-05 1.25383e-05 0.000610664
0.56 4.63299e-05 1.80852e-05 0.000610664
0.63 4.22832e-05 1.87244e-05 0.000610664
0.7 3.8944e-05 1.93101e-05 0.000610664
0.84 3.37351e-05 2.04174e-05 0.000610664
1.12 2.65995e-05 2.25418e-05 0.000610664
1.4 2.1936e-05 2.41638e-05 0.000610664
1.68 0 4.40076e-05 0.000610664
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.89764e-05 0.000610664
0.14 0 2.70012e-05 0.000610664
0.28 0 2.51016e-05 0.000610664
0.35 0 2.40922e-05 0.000610664
0.42 0 2.30957e-05 0.000610664
0.49 0 2.21433e-05 0.000610664
0.56 0 2.12575e-05 0.000610664
0.63 0 2.04523e-05 0.000610664
0.7 0 1.97342e-05 0.000610664
0.84 0 1.85571e-05 0.000610664
1.12 0 1.70525e-05 0.000610664
1.4 0 1.62383e-05 0.000610664
1.68 0 1.57202e-05 0.000610664
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.23209e-05 0.000610664
0.14 0 1.19729e-05 0.000610664
0.28 0 1.18364e-05 0.000610664
0.35 0 1.1765e-05 0.000610664
0.42 0 1.1692e-05 0.000610664
0.49 0 1.16174e-05 0.000610664
0.56 0 1.15415e-05 0.000610664
0.63 0 1.14645e-05 0.000610664
0.7 0 1.13866e-05 0.000610664
0.84 0 1.12286e-05 0.000610664
1.12 0 1.09062e-05 0.000610664
1.4 0 1.05776e-05 0.000610664
1.68 0 1.02431e-05 0.000610664
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.0436e-05 0.000610664
0.14 0 1.03181e-05 0.000610664
0.28 0 1.02827e-05 0.000610664
0.35 0 1.02641e-05 0.000610664
0.42 0 1.0245e-05 0.000610664
0.49 0 1.02253e-05 0.000610664
0.56 0 1.0205e-05 0.000610664
0.63 0 1.01841e-05 0.000610664
0.7 0 1.01626e-05 0.000610664
0.84 0 1.01175e-05 0.000610664
1.12 0 1.00172e-05 0.000610664
1.4 0 9.8733e-06 0.000610664
1.68 0 9.58175e-06 0.000610664
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000121272 2.58426e-05 0.000610664
0.28 6.86112e-05 2.78188e-05 0.000610664
0.35 5.54947e-05 3.12117e-05 0.000610664
0.42 4.65322e-05 3.42706e-05 0.000610664
0.49 4.08755e-05 3.55205e-05 0.000610664
0.56 3.35405e-05 3.96486e-05 0.000610664
0.63 2.94009e-05 4.12735e-05 0.000610664
0.7 2.60535e-05 4.26151e-05 0.000610664
0.84 2.10025e-05 4.47461e-05 0.000610664
1.12 1.4424e-05 4.80529e-05 0.000610664
1.4 1.03605e-05 5.03658e-05 0.000610664
1.68 0 5.95973e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000123453 2.16163e-05 0.000610664
0.28 7.35216e-05 1.98995e-05 0.000610664
0.35 6.18244e-05 2.10267e-05 0.000610664
0.42 5.53367e-05 2.0826e-05 0.000610664
0.49 5.02035e-05 2.08249e-05 0.000610664
0.56 4.30336e-05 2.41143e-05 0.000610664
0.63 3.89508e-05 2.5055e-05 0.000610664
0.7 3.55934e-05 2.58272e-05 0.000610664
0.84 3.04001e-05 2.70796e-05 0.000610664
1.12 2.34671e-05 2.92113e-05 0.000610664
1.4 1.90797e-05 3.10369e-05 0.000610664
1.68 0 4.87429e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000124949 1.96143e-05 0.000610664
0.28 7.52264e-05 1.76242e-05 0.000610664
0.35 6.37136e-05 1.85306e-05 0.000610664
0.42 5.72626e-05 1.81979e-05 0.000610664
0.49 5.17016e-05 1.85489e-05 0.000610664
0.56 4.39077e-05 2.23637e-05 0.000610664
0.63 3.9734e-05 2.33058e-05 0.000610664
0.7 3.62877e-05 2.4091e-05 0.000610664
0.84 3.09712e-05 2.53663e-05 0.000610664
1.12 2.40379e-05 2.745e-05 0.000610664
1.4 1.97744e-05 2.91518e-05 0.000610664
1.68 0 4.74739e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000115608 3.50312e-05 0.000610664
0.28 5.83119e-05 4.55418e-05 0.000610664
0.35 4.49743e-05 5.09966e-05 0.000610664
0.42 3.77431e-05 5.36392e-05 0.000610664
0.49 3.17863e-05 5.8277e-05 0.000610664
0.56 2.4851e-05 6.28011e-05 0.000610664
0.63 2.09385e-05 6.49097e-05 0.000610664
0.7 1.79023e-05 6.66157e-05 0.000610664
0.84 1.3077e-05 6.97887e-05 0.000610664
1.12 8.49625e-06 7.31327e-05 0.000610664
1.4 6.21704e-06 7.4809e-05 0.000610664
1.68 0 8.01802e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000119812 2.94677e-05 0.000610664
0.28 6.54912e-05 3.40758e-05 0.000610664
0.35 5.13057e-05 3.94727e-05 0.000610664
0.42 4.45564e-05 4.07913e-05 0.000610664
0.49 3.88127e-05 4.2283e-05 0.000610664
0.56 3.15132e-05 4.63845e-05 0.000610664
0.63 2.72338e-05 4.81364e-05 0.000610664
0.7 2.37708e-05 4.96133e-05 0.000610664
0.84 1.73816e-05 5.3278e-05 0.000610664
1.12 1.12978e-05 5.68197e-05 0.000610664
1.4 8.22247e-06 5.88459e-05 0.000610664
1.68 0 6.6398e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000121356 2.66641e-05 0.000610664
0.28 6.77499e-05 3.03143e-05 0.000610664
0.35 5.37608e-05 3.54326e-05 0.000610664
0.42 4.70926e-05 3.64729e-05 0.000610664
0.49 4.08946e-05 3.81779e-05 0.000610664
0.56 3.29078e-05 4.27905e-05 0.000610664
0.63 2.85927e-05 4.44477e-05 0.000610664
0.7 2.51025e-05 4.58613e-05 0.000610664
0.84 1.86949e-05 4.94652e-05 0.000610664
1.12 1.26703e-05 5.29469e-05 0.000610664
1.4 9.66659e-06 5.48745e-05 0.000610664
1.68 0 6.37319e-05 0.000610664
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000166283
0 0.44 0 0.000166283
0 0.74 0 0.000166283
0 1.03 0 0.000166283
0 1.18 0 0.000166283
0 1.48 0 0.000166283
0 1.77 0 0.000166283
0 1.92 0 0.000166283
0 2.22 0 0.000166283
0 2.96 0 0.000166283
0.44 0.44 0 0.000166283
0.44 0.74 0 0.000166283
0.44 1.03 0 0.000166283
0.44 1.18 0 0.000166283
0.44 1.48 0 0.000166283
0.44 1.77 0 0.000166283
0.44 1.92 0 0.000166283
0.44 2.22 0 0.000166283
0.44 2.96 0 0.000166283
0.74 0.74 0 0.000166283
0.74 1.03 0 0.000166283
0.74 1.18 0 0.000166283
0.74 1.48 0 0.000166283
0.74 1.77 0 0.000166283
0.74 1.92 0 0.000166283
0.74 2.22 0 0.000166283
0.74 2.96 0 0.000166283
1.03 1.03 0 0.000166283
1.03 1.18 0 0.000166283
1.03 1.48 0 0.000166283
1.03 1.77 0 0.000166283
1.03 1.92 0 0.000166283
1.03 2.22 0 0.000166283
1.03 2.96 0 0.000166283
1.18 1.18 0 0.000166283
1.18 1.48 0 0.000166283
1.18 1.77 0 0.000166283
1.18 1.92 0 0.000166283
1.18 2.22 0 0.000166283
1.18 2.96 0 0.000166283
1.48 1.48 0 0.000166283
1.48 1.77 0 0.000166283
1.48 1.92 0 0.000166283
1.48 2.22 0 0.000166283
1.48 2.96 0 0.000166283
1.77 1.77 0 0.000166283
1.77 1.92 0 0.000166283
1.77 2.22 0 0.000166283
1.77 2.96 0 0.000166283
1.92 1.92 0 0.000166283
1.92 2.22 0 0.000166283
1.92 2.96 0 0.000166283
2.22 2.22 0 0.000166283
2.22 2.96 0 0.000166283
2.96 0 2.96 0.000166283
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.00014806 6.0032e-06 8.31416e-05
0.6 8.72099e-05 8.08133e-06 8.31416e-05
0.75 7.37384e-05 9.38141e-06 8.31416e-05
0.9 6.50704e-05 1.01538e-05 8.31416e-05
1.05 5.63535e-05 1.19692e-05 8.31416e-05
1.2 4.99443e-05 1.33485e-05 8.31416e-05
1.35 4.57542e-05 1.41569e-05 8.31416e-05
1.5 3.71365e-05 2.01545e-05 8.31416e-05
1.8 3.21699e-05 2.13106e-05 8.31416e-05
2.4 2.52504e-05 2.33487e-05 8.31416e-05
3 1.95583e-05 2.58394e-05 8.31416e-05
3.6 0 4.34504e-05 8.31416e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.00014111 1.38723e-05 8.31416e-05
0.6 8.1707e-05 1.43318e-05 8.31416e-05
0.75 6.84653e-05 1.55604e-05 8.31416e-05
0.9 6.02964e-05 1.57031e-05 8.31416e-05
1.05 5.3374e-05 1.62431e-05 8.31416e-05
1.2 4.68504e-05 1.79145e-05 8.31416e-05
1.35 4.25354e-05 1.89832e-05 8.31416e-05
1.5 3.61744e-05 2.28577e-05 8.31416e-05
1.8 3.09981e-05 2.44961e-05 8.31416e-05
2.4 2.4072e-05 2.71202e-05 8.31416e-05
3 1.86949e-05 2.98237e-05 8.31416e-05
3.6 0 4.6886e-05 8.31416e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000140269 1.5854e-05 8.31416e-05
0.6 7.95803e-05 1.82502e-05 8.31416e-05
0.75 6.60577e-05 2.0166e-05 8.31416e-05
0.9 5.75943e-05 2.08744e-05 8.31416e-05
1.05 5.04916e-05 2.17562e-05 8.31416e-05
1.2 4.40156e-05 2.35596e-05 8.31416e-05
1.35 3.97364e-05 2.47136e-05 8.31416e-05
1.5 3.3428e-05 2.86658e-05 8.31416e-05
1.8 2.82882e-05 3.05424e-05 8.31416e-05
2.4 2.12886e-05 3.37244e-05 8.31416e-05
3 1.59798e-05 3.67443e-05 8.31416e-05
3.6 0 5.13943e-05 8.31416e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000134986 2.28838e-05 8.31416e-05
0.6 6.96619e-05 3.38989e-05 8.31416e-05
0.75 5.72228e-05 3.7435e-05 8.31416e-05
0.9 4.84984e-05 4.06081e-05 8.31416e-05
1.05 4.09459e-05 4.37168e-05 8.31416e-05
1.2 3.44564e-05 4.69265e-05 8.31416e-05
1.35 3.02674e-05 4.88497e-05 8.31416e-05
1.5 2.42707e-05 5.31037e-05 8.31416e-05
1.8 2.00089e-05 5.48545e-05 8.31416e-05
2.4 1.37294e-05 5.79563e-05 8.31416e-05
3 9.76125e-06 6.05071e-05 8.31416e-05
3.6 0 7.07783e-05 8.31416e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000135316 2.36301e-05 8.31416e-05
0.6 6.7595e-05 3.84026e-05 8.31416e-05
0.75 5.37506e-05 4.24264e-05 8.31416e-05
0.9 4.48935e-05 4.50291e-05 8.31416e-05
1.05 3.71003e-05 4.78004e-05 8.31416e-05
1.2 3.05564e-05 5.08231e-05 8.31416e-05
1.35 2.61856e-05 5.28313e-05 8.31416e-05
1.5 2.00076e-05 5.73068e-05 8.31416e-05
1.8 1.53513e-05 5.98066e-05 8.31416e-05
2.4 1.05063e-05 6.30361e-05 8.31416e-05
3 7.41771e-06 6.59394e-05 8.31416e-05
3.6 0 7.35747e-05 8.31416e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000140175 1.46544e-05 8.31416e-05
0.6 7.96936e-05 1.62943e-05 8.31416e-05
0.75 6.66489e-05 1.76954e-05 8.31416e-05
0.9 5.85025e-05 1.82527e-05 8.31416e-05
1.05 5.14615e-05 1.91808e-05 8.31416e-05
1.2 4.47278e-05 2.11824e-05 8.31416e-05
1.35 4.00772e-05 2.25606e-05 8.31416e-05
1.5 3.34277e-05 2.66501e-05 8.31416e-05
1.8 2.76247e-05 2.87572e-05 8.31416e-05
2.4 2.01469e-05 3.18759e-05 8.31416e-05
3 1.50997e-05 3.45089e-05 8.31416e-05
3.6 0 4.83455e-05 8.31416e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 3.85072e-05 8.31416e-05
0.3 0 3.01556e-05 8.31416e-05
0.6 0 2.5149e-05 8.31416e-05
0.75 0 2.30367e-05 8.31416e-05
0.9 0 2.12534e-05 8.31416e-05
1.05 0 1.9782e-05 8.31416e-05
1.2 0 1.82214e-05 8.31416e-05
1.35 0 1.72774e-05 8.31416e-05
1.5 0 1.65106e-05 8.31416e-05
1.8 0 1.53432e-05 8.31416e-05
2.4 0 1.36758e-05 8.31416e-05
3 0 1.22058e-05 8.31416e-05
3.6 0 1.081e-05 8.31416e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 2.21675e-05 8.31416e-05
0.3 0 2.00002e-05 8.31416e-05
0.6 0 1.91215e-05 8.31416e-05
0.75 0 1.86582e-05 8.31416e-05
0.9 0 1.81798e-05 8.31416e-05
1.05 0 1.76901e-05 8.31416e-05
1.2 0 1.68822e-05 8.31416e-05
1.35 0 1.63993e-05 8.31416e-05
1.5 0 1.59259e-05 8.31416e-05
1.8 0 1.50316e-05 8.31416e-05
2.4 0 1.35353e-05 8.31416e-05
3 0 1.24338e-05 8.31416e-05
3.6 0 1.16745e-05 8.31416e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.00013111 2.80842e-05 8.31416e-05
0.6 6.3731e-05 4.26296e-05 8.31416e-05
0.75 4.98984e-05 4.67934e-05 8.31416e-05
0.9 4.12459e-05 4.91916e-05 8.31416e-05
1.05 3.44301e-05 5.13265e-05 8.31416e-05
1.2 2.79386e-05 5.44243e-05 8.31416e-05
1.35 2.36e-05 5.64935e-05 8.31416e-05
1.5 1.87452e-05 5.97169e-05 8.31416e-05
1.8 1.41858e-05 6.2241e-05 8.31416e-05
2.4 9.61199e-06 6.5411e-05 8.31416e-05
3 6.7497e-06 6.83087e-05 8.31416e-05
3.6 0 7.54357e-05 8.31416e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000136187 1.91389e-05 8.31416e-05
0.6 7.62508e-05 2.01372e-05 8.31416e-05
0.75 6.32123e-05 2.166e-05 8.31416e-05
0.9 5.52146e-05 2.19936e-05 8.31416e-05
1.05 4.90399e-05 2.23067e-05 8.31416e-05
1.2 4.23351e-05 2.43965e-05 8.31416e-05
1.35 3.77281e-05 2.58409e-05 8.31416e-05
1.5 3.23347e-05 2.88066e-05 8.31416e-05
1.8 2.65807e-05 3.11811e-05 8.31416e-05
2.4 1.90483e-05 3.50262e-05 8.31416e-05
3 1.38838e-05 3.82661e-05 8.31416e-05
3.6 0 5.10799e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000130463 3.46028e-05 8.31416e-05
0.6 6.14767e-05 5.13019e-05 8.31416e-05
0.75 4.76882e-05 5.56297e-05 8.31416e-05
0.9 3.90712e-05 5.83052e-05 8.31416e-05
1.05 3.22341e-05 6.07652e-05 8.31416e-05
1.2 2.57497e-05 6.41631e-05 8.31416e-05
1.35 2.13483e-05 6.64895e-05 8.31416e-05
1.5 1.64351e-05 6.99231e-05 8.31416e-05
1.8 1.16403e-05 7.28914e-05 8.31416e-05
2.4 6.74808e-06 7.66804e-05 8.31416e-05
3 4.16879e-06 7.95897e-05 8.31416e-05
3.6 0 8.44473e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000135514 2.16781e-05 8.31416e-05
0.6 7.419e-05 2.46774e-05 8.31416e-05
0.75 6.09601e-05 2.66896e-05 8.31416e-05
0.9 5.27865e-05 2.74323e-05 8.31416e-05
1.05 4.65146e-05 2.8029e-05 8.31416e-05
1.2 3.99084e-05 3.02435e-05 8.31416e-05
1.35 3.53859e-05 3.17739e-05 8.31416e-05
1.5 3.00802e-05 3.48175e-05 8.31416e-05
1.8 2.44429e-05 3.73692e-05 8.31416e-05
2.4 1.69841e-05 4.15359e-05 8.31416e-05
3 1.19713e-05 4.48686e-05 8.31416e-05
3.6 0 5.59586e-05 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000124023 4.81241e-05 8.31416e-05
0.6 5.5732e-05 6.81708e-05 8.31416e-05
0.75 4.23479e-05 7.49865e-05 8.31416e-05
0.9 3.3955e-05 7.98024e-05 8.31416e-05
1.05 2.75282e-05 8.64411e-05 8.31416e-05
1.2 2.18668e-05 9.0314e-05 8.31416e-05
1.35 1.83112e-05 9.26748e-05 8.31416e-05
1.5 1.43465e-05 9.57613e-05 8.31416e-05
1.8 1.10711e-05 9.77788e-05 8.31416e-05
2.4 7.06034e-06 0.000100394 8.31416e-05
3 4.69938e-06 0.000103191 8.31416e-05
3.6 0 0.000110319 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000130844 2.78049e-05 8.31416e-05
0.6 6.47308e-05 4.00049e-05 8.31416e-05
0.75 5.24353e-05 4.338e-05 8.31416e-05
0.9 4.37548e-05 4.66835e-05 8.31416e-05
1.05 3.70952e-05 4.97306e-05 8.31416e-05
1.2 2.80431e-05 5.45739e-05 8.31416e-05
1.35 2.3947e-05 5.67216e-05 8.31416e-05
1.5 1.93211e-05 5.98575e-05 8.31416e-05
1.8 1.49852e-05 6.20868e-05 8.31416e-05
2.4 8.75022e-06 6.57655e-05 8.31416e-05
3 5.19751e-06 6.83347e-05 8.31416e-05
3.6 0 7.4217e-05 8.31416e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000168094
0 0.66 0 0.000168094
0 0.96 0 0.000168094
0 1.47 0 0.000168094
0 1.62 0 0.000168094
0 1.92 0 0.000168094
0 2.43 0 0.000168094
0 2.58 0 0.000168094
0 2.88 0 0.000168094
0 3.84 0 0.000168094
0.66 0.66 0 0.000168094
0.66 0.96 0 0.000168094
0.66 1.47 0 0.000168094
0.66 1.62 0 0.000168094
0.66 1.92 0 0.000168094
0.66 2.43 0 0.000168094
0.66 2.58 0 0.000168094
0.66 2.88 0 0.000168094
0.66 3.84 0 0.000168094
0.96 0.96 0 0.000168094
0.96 1.47 0 0.000168094
0.96 1.62 0 0.000168094
0.96 1.92 0 0.000168094
0.96 2.43 0 0.000168094
0.96 2.58 0 0.000168094
0.96 2.88 0 0.000168094
0.96 3.84 0 0.000168094
1.47 1.47 0 0.000168094
1.47 1.62 0 0.000168094
1.47 1.92 0 0.000168094
1.47 2.43 0 0.000168094
1.47 2.58 0 0.000168094
1.47 2.88 0 0.000168094
1.47 3.84 0 0.000168094
1.62 1.62 0 0.000168094
1.62 1.92 0 0.000168094
1.62 2.43 0 0.000168094
1.62 2.58 0 0.000168094
1.62 2.88 0 0.000168094
1.62 3.84 0 0.000168094
1.92 1.92 0 0.000168094
1.92 2.43 0 0.000168094
1.92 2.58 0 0.000168094
1.92 2.88 0 0.000168094
1.92 3.84 0 0.000168094
2.43 2.43 0 0.000168094
2.43 2.58 0 0.000168094
2.43 2.88 0 0.000168094
2.43 3.84 0 0.000168094
2.58 2.58 0 0.000168094
2.58 2.88 0 0.000168094
2.58 3.84 0 0.000168094
2.88 2.88 0 0.000168094
2.88 3.84 0 0.000168094
3.84 0 3.84 0.000168094
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000146568 5.02495e-06 8.4047e-05
0.6 8.65107e-05 7.72704e-06 8.4047e-05
0.75 7.44525e-05 8.10027e-06 8.4047e-05
0.9 6.91912e-05 6.92988e-06 8.4047e-05
1.05 6.10527e-05 7.63648e-06 8.4047e-05
1.2 4.90899e-05 1.52999e-05 8.4047e-05
1.35 4.47325e-05 1.6183e-05 8.4047e-05
1.5 4.10382e-05 1.70125e-05 8.4047e-05
1.8 3.51456e-05 1.84732e-05 8.4047e-05
2.4 2.72684e-05 2.05896e-05 8.4047e-05
3 2.27245e-05 2.16227e-05 8.4047e-05
3.6 0 4.21628e-05 8.4047e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000139132 1.26134e-05 8.4047e-05
0.6 8.14751e-05 1.24631e-05 8.4047e-05
0.75 6.96557e-05 1.26639e-05 8.4047e-05
0.9 6.39559e-05 1.16561e-05 8.4047e-05
1.05 5.80155e-05 1.14228e-05 8.4047e-05
1.2 4.84838e-05 1.68488e-05 8.4047e-05
1.35 4.4164e-05 1.77571e-05 8.4047e-05
1.5 4.04466e-05 1.85645e-05 8.4047e-05
1.8 3.44414e-05 1.98822e-05 8.4047e-05
2.4 2.65257e-05 2.16293e-05 8.4047e-05
3 2.22986e-05 2.24663e-05 8.4047e-05
3.6 0 4.30286e-05 8.4047e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000138894 1.35323e-05 8.4047e-05
0.6 8.12519e-05 1.35359e-05 8.4047e-05
0.75 6.93507e-05 1.41118e-05 8.4047e-05
0.9 6.32992e-05 1.31999e-05 8.4047e-05
1.05 5.69962e-05 1.29368e-05 8.4047e-05
1.2 4.73217e-05 1.82256e-05 8.4047e-05
1.35 4.29978e-05 1.90478e-05 8.4047e-05
1.5 3.93936e-05 1.98249e-05 8.4047e-05
1.8 3.37407e-05 2.12537e-05 8.4047e-05
2.4 2.61844e-05 2.36108e-05 8.4047e-05
3 2.15726e-05 2.51067e-05 8.4047e-05
3.6 0 4.46569e-05 8.4047e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000140746 1.25047e-05 8.4047e-05
0.6 8.04344e-05 1.50092e-05 8.4047e-05
0.75 6.85846e-05 1.55484e-05 8.4047e-05
0.9 6.25594e-05 1.46735e-05 8.4047e-05
1.05 5.62133e-05 1.45239e-05 8.4047e-05
1.2 4.70636e-05 1.9347e-05 8.4047e-05
1.35 4.25966e-05 2.03596e-05 8.4047e-05
1.5 3.88407e-05 2.13303e-05 8.4047e-05
1.8 3.29027e-05 2.31458e-05 8.4047e-05
2.4 2.49448e-05 2.623e-05 8.4047e-05
3 2.01555e-05 2.832e-05 8.4047e-05
3.6 0 4.68405e-05 8.4047e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000130323 2.7435e-05 8.4047e-05
0.6 7.04223e-05 3.27562e-05 8.4047e-05
0.75 5.49589e-05 3.93818e-05 8.4047e-05
0.9 4.83178e-05 4.11065e-05 8.4047e-05
1.05 4.12148e-05 4.33268e-05 8.4047e-05
1.2 3.03307e-05 5.11997e-05 8.4047e-05
1.35 2.59923e-05 5.32006e-05 8.4047e-05
1.5 2.2525e-05 5.4826e-05 8.4047e-05
1.8 1.75039e-05 5.72524e-05 8.4047e-05
2.4 1.2014e-05 6.00704e-05 8.4047e-05
3 9.63567e-06 6.14787e-05 8.4047e-05
3.6 0 7.15441e-05 8.4047e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000135394 1.99172e-05 8.4047e-05
0.6 7.39111e-05 2.64392e-05 8.4047e-05
0.75 6.12317e-05 2.88519e-05 8.4047e-05
0.9 5.4377e-05 2.97303e-05 8.4047e-05
1.05 4.71828e-05 3.13796e-05 8.4047e-05
1.2 3.38324e-05 4.13796e-05 8.4047e-05
1.35 2.91927e-05 4.35272e-05 8.4047e-05
1.5 2.41842e-05 4.66622e-05 8.4047e-05
1.8 1.84051e-05 4.9899e-05 8.4047e-05
2.4 1.12487e-05 5.44266e-05 8.4047e-05
3 7.63229e-06 5.67835e-05 8.4047e-05
3.6 0 6.38373e-05 8.4047e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 4.72749e-05 8.4047e-05
0.3 0 3.51949e-05 8.4047e-05
0.6 0 3.04805e-05 8.4047e-05
0.75 0 2.825e-05 8.4047e-05
0.9 0 2.61827e-05 8.4047e-05
1.05 0 2.43165e-05 8.4047e-05
1.2 0 2.26714e-05 8.4047e-05
1.35 0 2.12505e-05 8.4047e-05
1.5 0 2.00436e-05 8.4047e-05
1.8 0 1.81939e-05 8.4047e-05
2.4 0 1.60884e-05 8.4047e-05
3 0 1.50833e-05 8.4047e-05
3.6 0 1.44881e-05 8.4047e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000130415 2.48133e-05 8.4047e-05
0.6 7.05944e-05 2.94872e-05 8.4047e-05
0.75 5.80652e-05 3.17832e-05 8.4047e-05
0.9 5.10577e-05 3.27111e-05 8.4047e-05
1.05 4.50728e-05 3.3816e-05 8.4047e-05
1.2 3.3103e-05 4.25359e-05 8.4047e-05
1.35 2.86203e-05 4.45457e-05 8.4047e-05
1.5 2.37263e-05 4.75243e-05 8.4047e-05
1.8 1.80881e-05 5.04655e-05 8.4047e-05
2.4 1.1084e-05 5.46675e-05 8.4047e-05
3 7.59864e-06 5.70364e-05 8.4047e-05
3.6 0 6.4353e-05 8.4047e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000130619 2.48189e-05 8.4047e-05
0.6 6.96794e-05 3.06705e-05 8.4047e-05
0.75 5.74717e-05 3.28595e-05 8.4047e-05
0.9 5.05803e-05 3.36095e-05 8.4047e-05
1.05 4.45757e-05 3.45797e-05 8.4047e-05
1.2 3.2531e-05 4.32459e-05 8.4047e-05
1.35 2.79494e-05 4.5307e-05 8.4047e-05
1.5 2.29816e-05 4.83948e-05 8.4047e-05
1.8 1.72821e-05 5.16195e-05 8.4047e-05
2.4 1.02488e-05 5.63096e-05 8.4047e-05
3 6.59638e-06 5.89457e-05 8.4047e-05
3.6 0 6.50934e-05 8.4047e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000131118 2.47014e-05 8.4047e-05
0.6 6.94604e-05 3.13388e-05 8.4047e-05
0.75 5.69323e-05 3.38298e-05 8.4047e-05
0.9 4.9774e-05 3.48387e-05 8.4047e-05
1.05 4.36041e-05 3.60161e-05 8.4047e-05
1.2 3.18776e-05 4.44441e-05 8.4047e-05
1.35 2.73375e-05 4.65611e-05 8.4047e-05
1.5 2.24295e-05 4.96856e-05 8.4047e-05
1.8 1.68119e-05 5.30052e-05 8.4047e-05
2.4 9.73429e-06 5.8046e-05 8.4047e-05
3 5.9483e-06 6.1081e-05 8.4047e-05
3.6 0 6.67856e-05 8.4047e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000121594 3.98517e-05 8.4047e-05
0.6 5.85944e-05 5.19191e-05 8.4047e-05
0.75 4.42835e-05 5.86967e-05 8.4047e-05
0.9 3.6782e-05 6.21109e-05 8.4047e-05
1.05 3.02917e-05 6.69761e-05 8.4047e-05
1.2 2.21398e-05 7.30627e-05 8.4047e-05
1.35 1.81325e-05 7.5572e-05 8.4047e-05
1.5 1.50838e-05 7.75133e-05 8.4047e-05
1.8 1.08526e-05 8.04382e-05 8.4047e-05
2.4 6.6501e-06 8.36963e-05 8.4047e-05
3 4.87423e-06 8.54392e-05 8.4047e-05
3.6 0 9.10599e-05 8.4047e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.83563e-05
0 1.73 0 1.83563e-05
0 3.33 0 1.83563e-05
0 4.26 0 1.83563e-05
0 5.06 0 1.83563e-05
0 6.66 0 1.83563e-05
0 7.59 0 1.83563e-05
0 8.39 0 1.83563e-05
0 9.99 0 1.83563e-05
0 13.32 0 1.83563e-05
1.73 1.73 0 1.83563e-05
1.73 3.33 0 1.83563e-05
1.73 4.26 0 1.83563e-05
1.73 5.06 0 1.83563e-05
1.73 6.66 0 1.83563e-05
1.73 7.59 0 1.83563e-05
1.73 8.39 0 1.83563e-05
1.73 9.99 0 1.83563e-05
1.73 13.32 0 1.83563e-05
3.33 3.33 0 1.83563e-05
3.33 4.26 0 1.83563e-05
3.33 5.06 0 1.83563e-05
3.33 6.66 0 1.83563e-05
3.33 7.59 0 1.83563e-05
3.33 8.39 0 1.83563e-05
3.33 9.99 0 1.83563e-05
3.33 13.32 0 1.83563e-05
4.26 4.26 0 1.83563e-05
4.26 5.06 0 1.83563e-05
4.26 6.66 0 1.83563e-05
4.26 7.59 0 1.83563e-05
4.26 8.39 0 1.83563e-05
4.26 9.99 0 1.83563e-05
4.26 13.32 0 1.83563e-05
5.06 5.06 0 1.83563e-05
5.06 6.66 0 1.83563e-05
5.06 7.59 0 1.83563e-05
5.06 8.39 0 1.83563e-05
5.06 9.99 0 1.83563e-05
5.06 13.32 0 1.83563e-05
6.66 6.66 0 1.83563e-05
6.66 7.59 0 1.83563e-05
6.66 8.39 0 1.83563e-05
6.66 9.99 0 1.83563e-05
6.66 13.32 0 1.83563e-05
7.59 7.59 0 1.83563e-05
7.59 8.39 0 1.83563e-05
7.59 9.99 0 1.83563e-05
7.59 13.32 0 1.83563e-05
8.39 8.39 0 1.83563e-05
8.39 9.99 0 1.83563e-05
8.39 13.32 0 1.83563e-05
9.99 9.99 0 1.83563e-05
9.99 13.32 0 1.83563e-05
13.32 0 13.32 1.83563e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 7.70727e-05 1.28051e-05 9.17806e-06
3.2 4.16244e-05 1.8829e-05 9.17806e-06
4 3.48304e-05 2.0061e-05 9.17806e-06
4.8 2.63231e-05 2.44747e-05 9.17806e-06
5.6 2.11476e-05 2.79939e-05 9.17806e-06
6.4 1.8024e-05 2.94438e-05 9.17806e-06
7.2 1.52959e-05 3.08495e-05 9.17806e-06
8 1.31579e-05 3.18988e-05 9.17806e-06
9.6 0 4.2381e-05 9.17806e-06
12.8 0 4.2381e-05 9.17806e-06
16 0 4.2381e-05 9.17806e-06
19.2 0 4.2381e-05 9.17806e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 7.19495e-05 1.88937e-05 9.17806e-06
3.2 3.77517e-05 2.41014e-05 9.17806e-06
4 3.12477e-05 2.54782e-05 9.17806e-06
4.8 2.41341e-05 2.88483e-05 9.17806e-06
5.6 2.0153e-05 3.08419e-05 9.17806e-06
6.4 1.72664e-05 3.20493e-05 9.17806e-06
7.2 1.49348e-05 3.3145e-05 9.17806e-06
8 1.29865e-05 3.41298e-05 9.17806e-06
9.6 0 4.51026e-05 9.17806e-06
12.8 0 4.51026e-05 9.17806e-06
16 0 4.51026e-05 9.17806e-06
19.2 0 4.51026e-05 9.17806e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 7.10698e-05 2.03921e-05 9.17806e-06
3.2 3.71086e-05 2.56048e-05 9.17806e-06
4 3.09144e-05 2.68625e-05 9.17806e-06
4.8 2.38044e-05 3.0346e-05 9.17806e-06
5.6 1.95741e-05 3.26598e-05 9.17806e-06
6.4 1.63623e-05 3.43051e-05 9.17806e-06
7.2 1.36436e-05 3.6008e-05 9.17806e-06
8 1.15478e-05 3.73638e-05 9.17806e-06
9.6 0 4.69941e-05 9.17806e-06
12.8 0 4.69941e-05 9.17806e-06
16 0 4.69941e-05 9.17806e-06
19.2 0 4.69943e-05 9.17806e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 7.02531e-05 2.24514e-05 9.17806e-06
3.2 3.64029e-05 2.78811e-05 9.17806e-06
4 3.02924e-05 2.92348e-05 9.17806e-06
4.8 2.33056e-05 3.29001e-05 9.17806e-06
5.6 1.89839e-05 3.55508e-05 9.17806e-06
6.4 1.56356e-05 3.74956e-05 9.17806e-06
7.2 1.27249e-05 3.94579e-05 9.17806e-06
8 1.04566e-05 4.11284e-05 9.17806e-06
9.6 0 4.95055e-05 9.17806e-06
12.8 0 4.95055e-05 9.17806e-06
16 0 4.95055e-05 9.17806e-06
19.2 0 4.95055e-05 9.17806e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 6.80015e-05 3.08859e-05 9.17806e-06
3.2 3.36584e-05 3.85538e-05 9.17806e-06
4 2.75006e-05 4.04561e-05 9.17806e-06
4.8 2.0938e-05 4.40865e-05 9.17806e-06
5.6 1.71447e-05 4.65752e-05 9.17806e-06
6.4 1.43547e-05 4.82697e-05 9.17806e-06
7.2 1.19269e-05 4.99141e-05 9.17806e-06
8 1.01083e-05 5.09463e-05 9.17806e-06
9.6 0 5.93995e-05 9.17806e-06
12.8 0 5.93995e-05 9.17806e-06
16 0 5.93995e-05 9.17806e-06
19.2 0 5.93995e-05 9.17806e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 4.59423e-05 8.66424e-05 9.17806e-06
3.2 1.95217e-05 9.2759e-05 9.17806e-06
4 1.68641e-05 9.08466e-05 9.17806e-06
4.8 1.25324e-05 9.34708e-05 9.17806e-06
5.6 1.03412e-05 9.52085e-05 9.17806e-06
6.4 8.94776e-06 9.61762e-05 9.17806e-06
7.2 7.93763e-06 9.69672e-05 9.17806e-06
8 8.77156e-06 9.43731e-05 9.17806e-06
9.6 0 0.000104426 9.17806e-06
12.8 0 0.000104418 9.17806e-06
16 0 0.000104412 9.17806e-06
19.2 0 0.000104445 9.17806e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 2
